1.产 品 资 料 介 绍：
Sanki Technos CR-712VX晶圆清洁机器人 产品英文介绍
Sanki Technos CR-712VX wafer cleaning robot belongs to the category of wafer processing and transportation robotic arms, specifically designed for wafer picking and placing in wet cleaning machines.
Product Features:
1. Adopting a low dust cleaning arm structure, the release of particles is low in the cleaning solution environment, ensuring the cleanliness of the wafer surface
2. Vacuum adsorption type end effector, which evenly grasps the wafer and prevents deformation of thin silicon wafers
3. Equipped with the ability to quickly ｒｅｐｌａｃｅ chips and improve the production capacity of single chip cleaning machines
4. Corrosion resistant surface coating, capable of withstanding acidic and alkaline vapors evaporated in the cleaning environment
5. Equipped with wafer offset detection, the position is automatically corrected before loading to avoid card malfunctions
Product Parameters:
6. Model: CR-712VX
7. Applicable wafers: 200mm wafers
8. Drive structure: Multi joint horizontal rotating robotic arm
9. Working environment: Wet cleaning clean chamber
10. Communication: Machine specific IO interlocking signal
Application fields:
11. Semiconductor Single Chip Wet Cleaning Equipment Wafer Transfer
12. Transfer of upper and lower wafers in the photoresist cleaning machine after photolithography
13. Wafer surface particle cleaning process for picking and placing
14. Automatic wafer feeding unit for oxide layer cleaning equipment
15. Replacement of spare parts for Sanki CR series cleaning robotic arms
Maintenance of the robotic arm in the wet cleaning production line, Sanki Technos CR-712VX wafer cleaning robot is suitable for wet and corrosive conditions in the cleaning chamber.
Sanki Technos CR-712VX晶圆清洁机器人 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
