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CV-2000 FP3344R1射频发生器

发布时间:2026-09-11人气:
  • CV-2000 FP3344R1射频发生器
  • CV-2000 FP3344R1射频发生器
  • CV-2000 FP3344R1射频发生器

CV-2000 FP3344R1射频发生器 

1.产 品 资 料 介 绍:

CV-2000 FP3344R1 射频发生器是半导体真空设备常用的射频功率源,产线备件流通量很大
1. 功率输出稳定性优秀,长时间连续运行波动小,保障等离子工艺一致性
2. 内置电弧侦测保护,打火瞬间降功率,减少腔体内零件受损概率
3. 适配 50Ω 标准阻抗,可搭配匹配器协同工作,应对腔体负载变化
4. 自带本地面板与远程通讯两种控制方式,方便机台集成调试
5. 风冷散热结构,内部维护空间充足,拆机检修比较方便
1. 型号 CV-2000 FP3344R1
2. 额定输出功率 2000W
3. 工作频率 13.56MHz
4. 标准输出阻抗 50Ω
5. 支持连续与脉冲功率输出模式
这款射频发生器多用于各类等离子真空制程设备
1. 半导体晶圆刻蚀设备供电
2. 薄膜沉积 PVD、CVD 工艺
3. 晶圆表面等离子清洗处理
4. 光学镀膜等离子加工设备
5. 旧款等离子设备备件替换维修
总的来说 CV-2000 FP3344R1 属于成熟的 2kW 射频电源,是二手半导体设备维修替换的热门备件

CV-2000 FP3344R1射频发生器  产品英文介绍

The CV-2000 FP3344R1 RF generator is a commonly used RF power source for semiconductor vacuum equipment, and there is a large circulation of spare parts on the production line

1. Excellent power output stability, with minimal fluctuations during long-term continuous operation, ensuring consistency in plasma processes

2. Built in arc detection protection, power reduction at the moment of ignition, reducing the probability of damage to components inside the cavity

3. Suitable for 50 Ω standard impedance, can work together with a matching device to cope with changes in cavity load

4. Comes with two control methods: local panel and remote communication, making it convenient for machine integration and debugging

5. Air cooled cooling structure, sufficient internal maintenance space, easy disassembly and maintenance

1. Model CV-2000 FP3344R1

2. Rated output power 2000W

3. Operating frequency 13.56MHz

4. Standard output impedance of 50 Ω

5. Support continuous and pulse power output modes

This RF generator is commonly used in various plasma vacuum process equipment

1. Power supply for semiconductor wafer etching equipment

2. Thin film deposition PVD and CVD processes

3. Plasma cleaning treatment on wafer surface

4. Optical coating plasma processing equipment

5. Replacement and maintenance of spare parts for old plasma equipment

Overall, CV-2000 FP3344R1 is a mature 2kW RF power supply and a popular spare part for repairing and replacing second-hand semiconductor equipment

CV-2000 FP3344R1射频发生器   产品展示

CV-2000 FP3344R1.webp.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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