1.产 品 资 料 介 绍：
NIKON KBB17351旋转透镜组件 产品英文介绍
Many colleagues who maintain Nikon lithography machines have come into contact with the NIKON KBB17351 rotary lens component, which is a core spare part of the NSR series lithography machine optical unit. It adjusts the optical path through precise rotation, corrects exposure optical aberrations, and directly affects the accuracy of wafer pattern exposure.
Product Features
1. The optical lens has excellent coating, stable light transmission, and effectively reduces exposure light loss
2. The rotating mechanism has extremely high precision, and even small angle adjustments can complete optical path correction
3. Low particle design, no pollutants generated during operation, suitable for lithography clean workshops
4. Equipped with angle and position feedback, real-time feedback of rotation posture to the main control system of the machine
5. Original precision assembly, optical performance can be restored without complex debugging after replacement
Product Specifications
1. Compatible equipment: Nikon NSR series semiconductor lithography machine
2. Function: Optical path rotation adjustment, exposure aberration compensation
3. Precise rotary actuator with nanometer level precision for angle control
4. Optical lenses are resistant to UV aging and suitable for long-term exposure conditions
5. Working environment 5 ℃~24 ℃ constant temperature dust-free workshop
Application Areas
1. Nikon NSR lithography machine exposure optical system
2. Correction of optical path aberrations and fine-tuning of optical parameters in photolithography
3. Precision control of wafer lithography pattern exposure
4. Maintenance of lithography machine illumination light path unit
5. Nikon lithography machine optical spare parts maintenance and replacement
In general, the NIKON KBB17351 rotary lens component is a key component of the lithography machine optical system, with precise optical path adjustment and frequent maintenance and replacement of optical unit failures.
NIKON KBB17351旋转透镜组件 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
