Richardson Electronics 27-380115-00射频匹配器
1.产 品 资 料 介 绍：
Richardson Electronics 27-380115-00射频匹配器 产品英文介绍
Colleagues who do semiconductor RF maintenance often come across Richardson Electronics 27-380115-00 RF matching device, which is used for automatic impedance adjustment, reducing RF reflection power, stabilizing plasma state, and is the core spare part of semiconductor etching cavity RF circuit.
Product Features
1. The automatic tuning response is fast, and impedance matching is quickly completed when the plasma load changes
2. Built in power monitoring, real-time collection of reflected power, timely warning of abnormal working conditions
3. Integrated multiple protections, triggered by overheating and high reflection power, to protect the RF generator
4. Strong anti electromagnetic interference performance, suitable for complex electromagnetic environments in semiconductor workshops
5. Original standard interface, smooth communication with matching RF power supply, easy on-site disassembly and replacement
Product Specifications
1. Operating frequency 13.56MHz
2. Compatible with a maximum RF power of 2500W
3. Standard characteristic impedance 50 Ω
4. Power supply 24VDC
5. Support digital communication, return matching location and fault alarm information
Application Areas
1. Radio frequency impedance matching in semiconductor wafer dry etching process
2. RF matching for plasma thin film deposition chamber
3. Plasma surface cleaning process for wafers
4. RF circuit adjustment of plasma processing equipment
5. Maintenance and replacement of spare parts for RF matching devices in semiconductor equipment
Overall, Richardson Electronics 27-380115-00 RF matching device has fast tuning speed, good reflection power suppression effect, and is commonly used for replacing RF system faults in etching equipment.
Richardson Electronics 27-380115-00射频匹配器 产品展示
视频展示
其他产品
NOVOTRON ND32-5610 ND32-5610VS-101-011-31 伺服驱动器
3BHE039203R0101 GVC736CE101 可控硅模块
PPC907BE 3BHE024577R0101高压板模块
VMIVME-7750-740000 Gas turbine expansion module
VMIVME-7750-934 Gas turbine interface module
VMIVME-7751 Gas turbine interface module
| AWC 500 | AMAT 0100-51017 | 44308902 |
| AMC 300 | AMAT 0100-90522 | 330878-90-00 |
| ALSTOM V4555724-0100 | AMAT 0100-76088 | 3500/22 146031-01 |
| AGL 400 | AMAT 0100-01714 | CE945GM2A-T25 |
| AGC-4 | AMAT 0100-38018 | GKWE001450R0009 XT382B-R9 |
| AGC 200 | AMAT 0100-00021 | HESG223044R0001 PT8153B-E |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
