1.产 品 资 料 介 绍：
Komatsu RX-610-T1-R化学循环器控制器 产品英文介绍
Komatsu RX-610-T1-R Chemical Cycle Controller
Product Features:
1. Built in PID temperature control algorithm, stable control of liquid temperature and minimal process fluctuations
2. It comes with a built-in fault self check, which will sound an alarm and cut off the output in case of any abnormalities, protecting the entire liquid medicine pipeline
3. Equipped with RS232 communication port, it can be connected to the upper computer of the machine, remotely read and write parameters, and start stop
4. The operation panel is resistant to chemical corrosion and can resist the acidic and alkaline gases evaporated in the wet process workshop
5. Modular design, easy on-site disassembly and assembly, no need for large-scale line changes to ｒｅｐｌａｃｅ old circulating units
Product Parameters:
1. Model: RX-610-T1-R
2. Temperature control accuracy: ± 0.1 ℃
3. Temperature sensor: Pt100 platinum resistor
4. Communication interface: RS-232C
5. Compatible Unit: Komatsu Kelk EX-410 Chemical Cycle Unit
Application fields:
1. Constant temperature circulation control of chemical solution in wet cleaning tank for semiconductor wafers
2. Temperature regulation of etching supporting solution supply system
3. Temperature and flow linkage control of wafer surface treatment process tank solution
4. Precise wet chamber chemical medium constant temperature transportation
5.200mm wafer production line cycle temperature control spare parts replacement
This Komatsu RX-610-T1-R controller is the core component of wet chemical circulation equipment, which stably maintains the temperature of the chemical solution, ensures the quality of wafer processing, and can be quickly put into use by replacing spare parts and checking the model.
Komatsu RX-610-T1-R化学循环器控制器 产品展示
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| 710-657231-20 | 8005-DMU-1 | 820-22196-002 |
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| 710-657058-20 | 8005-CP-51 | 073-653015-00 |
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| 710-653699-20 | 8005-AN-108 | 710-809156-000 |
| 710-652697-20 | 8055-SCP-655X | 710-678525-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
