1.产 品 资 料 介 绍：
Genus X6045500电流积分器组件 产品英文介绍
Genius X6045500 current integrator component
Product Features:
1. High precision charge integration acquisition, accurately capturing plasma pulse current signals with small reading errors
2. Built in anti-interference filtering circuit, capable of resisting electromagnetic interference from RF cavities, with strong signal stability
3. Modular board structure, easy to plug and ｒｅｐｌａｃｅ on site, no need to modify the original machine wiring
4. Wide pulse signal adaptation range, capable of long-term continuous operation, suitable for semiconductor production conditions
5. Equipped with a signal verification circuit, it provides feedback on signal deviation in case of abnormalities, facilitating early troubleshooting
Product Parameters:
1. Material model: X6045500
2. Signal type: pulse current/charge integration acquisition
3. Power supply specification: ± 15V DC power supply
4. Signal output: Analog voltage signal
5. Compatible equipment: Genius plasma RF power supply supporting machine
Application fields:
1. Monitoring of plasma current in semiconductor etching chamber
2. RF discharge charge integration detection for thin film deposition equipment
3. Energy closed-loop feedback control of plasma process
4. Real time acquisition of plasma state in wafer dry process technology
5. Replacement of spare parts for RF power supply and renovation of signal acquisition system
This Genius X6045500 current integrator component is the signal acquisition core of RF plasma equipment, used to calculate the total amount of plasma charge, ensure the repeatability of semiconductor processes, and ｒｅｐｌａｃｅ spare parts by checking the model for quick machine operation.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
