1.产 品 资 料 介 绍：
MKS 1044718-001控制器模块 产品英文介绍
MKS 1044718-001 Controller Module
Product Features:
1. Adopting PID closed-loop control algorithm to quickly adjust chamber pressure, maintain stable process pressure, and respond quickly
2. Built in signal isolation processing circuit to resist electromagnetic interference from plasma chambers and accurately collect pressure data
3. Integrated fault self checking function, real-time monitoring of sensor and valve status, and outputting alarm signals in case of abnormalities
4. Metal reinforced shell, resistant to dust and process trace corrosion, suitable for long-term continuous operation of semiconductor production lines
5. Rack mounted standardized interface, easy to plug and ｒｅｐｌａｃｅ on-site, and the original circuit does not require large-scale modifications
Product Parameters:
1. Material model: 1044718-001
2. Control type: Vacuum pressure closed-loop control module
3. Working power supply: DC24V
4. Signal interface: analog+digital communication interface
5. Compatible equipment: semiconductor etching, deposition process vacuum chamber
Application fields:
Real time control of vacuum pressure in semiconductor etching chamber
2. Pressure control of CVD/PVD thin film deposition chamber process
3. Pressure sensor signal acquisition and valve drive control
4. Abnormal monitoring and protection of wafer process chamber pressure
5. Replacement and maintenance of spare parts for MKS vacuum control system controller
This MKS 1044718-001 controller module is the core unit of vacuum pressure control, which is linked with pressure gauges and regulating valves to stabilize the chamber process pressure, ensuring the repeatability of film and etching processes. By checking the model, it can be directly replaced on the machine.
MKS 1044718-001控制器模块 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
