1.产 品 资 料 介 绍：
Neslab 277003200000数字循环系统 产品英文介绍
Comet Technologies 832-242736-002 RF matching network module is an impedance matching spare part for LAM etching machines, which is commonly used in plasma processes.
Product Features
Fast tuning response, able to quickly follow changes in cavity load.
Effectively reduce reflected power and protect the RF generator.
Built in arc protection to reduce damage caused by chamber ignition.
Rack mounted installation, easy on-site replacement and maintenance.
Durable clean workshop conditions, stable and continuous operation for a long time.
Product Specifications
Model 832-242736-002 RF matching network.
Compatible with LAM semiconductor etching machine.
13.56MHz standard RF operating frequency.
Built in adjustable vacuum capacitor and sensing circuit.
Support machine communication feedback matching status.
Application Areas
Semiconductor etching cavity RF impedance matching.
Power regulation of wafer plasma process.
Repair and replacement of spare parts for LAM old machines.
Supporting equipment for vacuum plasma cleaning.
RF circuit for thin film deposition chamber.
This matching network is the core RF spare part of LAM machine, used to stabilize plasma and ensure process consistency
Neslab 277003200000数字循环系统 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
