VAT 64250-CE52-1101高压高真空闸阀

VAT 64250-CE52-1101高压高真空闸阀  

1.产 品 资 料 介 绍：

VAT 64250-CE52-1101高压高真空闸阀   产品英文介绍

VAT 64250-CE52-1101 high-pressure high vacuum gate valve is a 64.2 series motor-driven vacuum regulating valve commonly used in semiconductor vacuum chambers.

Product Features

Stepper motor drive, precise gate positioning, and continuous adjustment of vacuum degree.

Excellent sealing performance, low leakage rate, and stable maintenance of high vacuum environment.

Stainless steel valve body, resistant to plasma corrosion, suitable for clean processes.

With position feedback, the machine can read the valve status in real time.

The switch response is stable, and the high-frequency cycle has a longer service life.

Product Specifications

Model 64250-CE52-1101, DN320 diameter.

The ultimate vacuum can reach negative 8th power mbar of 10.

The maximum pressure difference is 1.2 bar, and the valve body can withstand a maximum temperature of 150 degrees Celsius.

24V DC power supply, RS232 communication interface.

Molecular flow conductivity of 30000L/s.

Application Areas

Vacuum pressure regulation of semiconductor etching chamber.

High vacuum isolation control of thin film deposition equipment.

Replacement of spare parts for vacuum valves in old semiconductor machines.

Vacuum pipeline control of plasma cleaning equipment.

Research on pressure throttling of large vacuum chambers.

This gate valve can both shut off isolation and fine tune vacuum pressure, making it a crucial executing component in vacuum processes

VAT 64250-CE52-1101高压高真空闸阀   产品展示

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英文产品

SIEGER 05701-A-0512 Digital logic module
Reliance Electric S-D4006-D module
Reliance Electric S-D4008-A industrial module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218