1.产 品 资 料 介 绍：
AMAT 0190-54072射频发生器 产品英文介绍
AMAT 0190-54072 RF Generator
Product Features
1. Accurate power output, stable repeatability of plasma process
2. Equipped with arc protection to reduce damage caused by ignition in the cavity
3 impedance matching, fast start, stable and adaptable to vacuum chambers
4 digital controls for convenient access to remote monitoring of devices
5 compact body suitable for internal installation in semiconductor cabinets
Product Specifications
Industrial AC power supply compatible with semiconductor equipment cabinet
2 fixed RF frequencies to meet plasma process requirements
3 built-in fault self-test abnormal output alarm signal
4. Support real-time data upload through device bus communication
5. Water cooling for long-term operation and stable temperature control
Application Areas
1. Plasma power supply for semiconductor wafer etching
RF power supply unit for thin film deposition equipment
3 Vacuum chamber plasma cleaning matching
4 PVD coating process plasma excitation
5. Replacement and matching of semiconductor equipment spare parts
This AMAT 0190-54072 RF generator is a spare part from the application material factory, commonly used for replacing power supplies in old semiconductor equipment
AMAT 0190-54072射频发生器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
