1.产 品 资 料 介 绍：
VAT 64250-UE52-AAT1电动执行器 产品英文介绍
VAT 64250-UE52-AAT1 electric actuator
Product Features
1. Fast action response, sensitive valve opening and closing control
2. High positioning accuracy, stable and reliable flow regulation
3. Good anti vibration performance, suitable for vacuum equipment working conditions
4. Comes with status feedback for easy device reading of location
5. Compact structure, easy installation and debugging
Product Specifications
1. Industrial standard power supply adapted vacuum control cabinet
2 adjustable stroke range to meet vacuum valve control requirements
3 built-in position sensors provide real-time feedback on valve position
4. Support industrial communication access to automation systems
5 shell protection level, high vacuum environment, durable
Application Areas
1. Semiconductor vacuum pipeline valve drive
Vacuum flow regulation of thin film deposition equipment
3. Air path control of vacuum coating chamber
4. Control of Plasma Process Gas Pipeline
5. Vacuum valve drive components for analytical instruments
This VAT 64250-UE52-AAT1 electric actuator is commonly used for vacuum valve matching and is a commonly used replacement spare part for semiconductor equipment
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
