1.产 品 资 料 介 绍：
ENI DCG-200EH-S0J直流等离子体发生器 产品英文介绍
ENI DCG-200EH-S0J DC plasma generator
Product Features
Stable DC output with uniform plasma ignition effect
2. Equipped with arc suppression to reduce ignition and protect the internal components of the chamber
3. Smooth power regulation process with good repeatability
4. Strong anti-interference ability and adaptability to semiconductor cabinet environment
5. Easy disassembly and assembly, convenient maintenance, and time-saving replacement
Product Specifications
1. Industrial AC input power supply
2 rated 20000W DC power output
3. Water cooling for long-term operation and stable temperature control
4 supports remote communication and can read the running status
5 standard cabinet installation dimensions
Application Areas
1. Plasma power supply for semiconductor PVD sputtering process
2 Vacuum Coating Equipment DC Plasma Excitation
3. Material surface etching treatment for power supply unit
4 Vacuum chamber plasma cleaning matching
Replacement of spare parts for 5 semiconductor old power supplies
This ENI DCG-200EH-S0J DC plasma generator is a power supply under MKS, commonly used for maintenance and replacement of thin film process equipment
ENI DCG-200EH-S0J直流等离子体发生器 产品展示
视频展示
其他产品
GE IS215UCVEM08B 数字输入/输出模块
GE IS215UCVEH2AE 数字量扩展模块
3BHB045647R0001 半导体可控硅模块
CS512 3BUR980009R1 Thermocouple module
CS513K02 3BSE004773R1 Thermocouple card
CS513K04 3BSE055760R1 Input characteristic module
| 369-HI-R-0-F-0-0-E | 531X305NTBAPG1 | IC3603A200A |
| 369-HI-R-0-0-0-0-E | 531X305NTBANG1 | 0271284-000 |
| 369-HI-R-0-0-0-0-0 | 531X305NTBAMG1 | IC3603A200 |
| 369-HI-R-0-0-0-0 | 531X305NTBALG1 | IC3603A177CH6 |
| 369-HI-R-0-0-0 | 531X305NTBAJG1 | IC3603A177CH2 |
| 369-HI-B-M-0-0 | 531X305NTBAHG1 | IC3603A177CG6 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
