1.产 品 资 料 介 绍：
Inficon 923-713-G1气体分析仪 产品英文介绍
Inficon 923-713-G1 gas analyzer
Product Features
1. High detection sensitivity to identify trace process gas components
Real time sampling analysis and rapid feedback of chamber gas changes
3 corrosion-resistant gases suitable for harsh semiconductor process environments
4 modular design, easy to disassemble and ｒｅｐｌａｃｅ
5. Stable operation, long-term online monitoring, less likely to drift
Product Specifications
Installation of industrial standard power supply adaptation equipment cabinet
2 wide pressure detection intervals covering vacuum process conditions
3 built-in mass spectrometry detection units for multi-component gas recognition
4. Support communication output docking with device main control system
5 Small Bodies Save Internal Space in Cabinets
Application Areas
Monitoring of residual gas in semiconductor etching chamber
Gas detection in PECVD thin film deposition process
3. Determination of the endpoint of vacuum chamber cleaning
4. Leakage investigation and testing of process chambers
Replacement of spare parts for Inficon equipment analyzer
This Inficon 923-713-G1 gas analyzer is a commonly used monitoring spare part for semiconductor vacuum equipment, mainly used for cavity process monitoring, maintenance, and replacement
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| 369-HI-R-0-F-0-0-E | 531X305NTBAPG1 | IC3603A200A |
| 369-HI-R-0-0-0-0-E | 531X305NTBANG1 | 0271284-000 |
| 369-HI-R-0-0-0-0-0 | 531X305NTBAMG1 | IC3603A200 |
| 369-HI-R-0-0-0-0 | 531X305NTBALG1 | IC3603A177CH6 |
| 369-HI-R-0-0-0 | 531X305NTBAJG1 | IC3603A177CH2 |
| 369-HI-B-M-0-0 | 531X305NTBAHG1 | IC3603A177CG6 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
