1.产 品 资 料 介 绍：
AE 3Z80-000653-V2射频匹配器 产品英文介绍
AE 3Z80-000653-V2 RF Matcher
Product Features
1. Fast automatic tuning speed, quickly reducing RF reflection power
Low power transmission loss and stable plasma ignition
3 built-in arc protection, protecting RF power supply during ignition
4. Good shielding effect to resist electromagnetic interference from cabinets
5 modular structure, easy disassembly and replacement
Product Specifications
1. Equipped with RF power supply of the same series
2 automatic impedance tuning, suitable for vacuum loads
3 water cooling and heat dissipation, stable operation for a long time with high power
4 built-in sensors provide real-time feedback on matching status
5 original factory interfaces, directly connected to RF lines
Application Areas
RF impedance matching of semiconductor etching equipment
2 PECVD thin film deposition RF matching unit
3. Power allocation of vacuum plasma cleaning equipment
4 Optical Coating Plasma Process Matching
Replacement of spare parts for high-frequency RF equipment in Japan
This AE 3Z80-000653-V2 RF matching device is used for RF power impedance adjustment and is a commonly used spare part for semiconductor vacuum machine maintenance
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
