CTI-Cryogenics 8185154G001晶圆卡盘冷却系统
1.产 品 资 料 介 绍：
AE 3152535-367直流电源模块 产品英文介绍
CTI Kryogenics 8185154G001 Wafer Chuck Cooling System
Product Features
1. High temperature control accuracy, maintaining uniform and stable wafer temperature
2. Strong low-temperature cooling capacity, suitable for plasma process heat dissipation
3 closed circulation pipelines, clean and free of particle pollution
4. Equipped with temperature monitoring and automatic alarm protection for overheating
5 modular design, easy disassembly and replacement
Product Specifications
1. Compatible with semiconductor machine standard power supply
2 closed-loop refrigerant circulation, wide temperature range
3 built-in temperature sensors for real-time data collection
4. Support communication docking with the main control system of the cavity
5 Vacuum chamber adapted sealing structure
Application Areas
Semiconductor etching machine wafer chuck cooling
2 PVD thin film deposition electrostatic chuck temperature control
3 Plasma Process Chamber Wafer Cooling
Temperature control of semiconductor thin film process
5. Maintenance and replacement of CTI low-temperature cooling spare parts
This CTI Kryogenics 8185154G001 cooling system is used for constant temperature control of wafer chucks and is a commonly used low-temperature spare part in semiconductor vacuum processes
AE 3152535-367直流电源模块 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
