TURBOVAC 800052V0001涡轮分子泵

TURBOVAC 800052V0001涡轮分子泵 

1.产 品 资 料 介 绍：

TURBOVAC 800052V0001涡轮分子泵  产品英文介绍

TURBOVAC 800052V0001 turbo molecular pump, an industrial high vacuum molecular pump, is used to evacuate semiconductor equipment cavities.

Product Features

1. High pumping efficiency, able to quickly pump the cavity to the target vacuum level

2. Smooth operation, minimal vibration, and no impact on precision processes

3. Built in protection mechanism, automatically shuts down in case of overload or abnormality

4. Stable speed and good vacuum environment maintenance effect

5. Anti dust, able to adapt to working conditions where a small amount of residue is generated during the process

6. Good temperature resistance, with low pressure during long-term continuous operation

7. Equipped with status monitoring, both speed and temperature can be viewed

8. Compact structure, easy installation inside the machine

9. The rotor dynamic balance is well done with low noise

10. Long service life, reducing frequent maintenance and replacement

Application Areas

1. Vacuum chamber of semiconductor etching equipment

2. Thin film deposition vacuum equipment

3. Plasma process vacuum system

4. Precision analytical instrument vacuum chamber

5. Research vacuum experimental apparatus

TURBOVAC 800052V0001 turbo molecular pump has stable pumping speed and reliable vacuum performance, making it the core pumping spare part for various high vacuum process equipment

TURBOVAC 800052V0001涡轮分子泵 产品展示

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英文产品

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218