Sinfonia Technology SCE92100137晶圆机器人
1.产 品 资 料 介 绍：
Sinfonia Technology SCE92100137晶圆机器人 产品英文介绍
The Sinfonia Technology SCE92100137 wafer robot, also known as the Xinfuyiya Semiconductor Clean Handling Robot, is specifically responsible for wafer picking, placing, and conveying in the machine.
Product Features
1. Accurate action positioning, less likely to deviate during wafer handling
2. High cleanliness level, minimal particle production during production line operation
3. Smooth operation with minimal shaking to prevent wafer edge breakage and scratches
4. Equipped with collision protection, it will immediately stop when encountering abnormalities
5. Adjustable movement speed, balancing handling efficiency and safety
6. Resistant to temperature and humidity changes in the workshop, stable and continuous operation for a long time
7. Smooth communication with the machine control system and fast response to action commands
8. The mechanical arm has a compact structure, making it easy to install inside the machine
9. Support wafer position detection, capable of identifying missing and offset wafers
10. Durable components reduce downtime and maintenance frequency
Application Areas
1. Internal transportation of semiconductor wafer etching equipment
2. Loading and unloading of crystal circles on the thin film deposition machine platform
3. Wafer pretreatment and plasma process equipment
4. EFEM front-end module wafer handling
5. Various semiconductor process cavities for wafer transfer
The Sinfonia Technology SCE92100137 wafer robot has precise positioning and good cleanliness, and is a core spare part responsible for automatic wafer transfer in semiconductor machines.
Sinfonia Technology SCE92100137晶圆机器人 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
