Kawasaki 3NS004S-C019晶圆预对准器

Kawasaki 3NS004S-C019晶圆预对准器 

1.产 品 资 料 介 绍：

Kawasaki 3NS004S-C019晶圆预对准器  产品英文介绍

Kawasaki 3NS004S-C019 wafer pre alignment device, Kawasaki Semiconductor EFEM front-end pre alignment component, uses CCD to identify wafer notches and locate wafer angles and centers in advance.

Product Features

1. High alignment accuracy, accurate positioning of wafer center and notch

2. Fast recognition speed, without slowing down the overall rhythm of the machine

3. Clean design, minimal particle generation during operation, protects the wafer

4. Equipped with CCD visual inspection, capable of identifying missing or skewed images

5. Smooth movement, gentle rotation, will not scratch the surface of the wafer

6. Anti workshop electromagnetic interference, stable long-term operation

7. Smooth communication and fast signal response with Kawasaki wafer robots

8. Compact size, easy to install inside the front-end module

9. Built in fault self check, easy to troubleshoot abnormal states

10. Durable mechanical components and low failure rate during continuous operation of the production line

Application Areas

1. Semiconductor EFEM front-end wafer transfer unit

Loading and unloading of 2.300mm wafer etching machine

3. Thin film deposition equipment wafer pre-processing station

4. Front end positioning module of wafer cleaning machine

5. Pre positioning of crystal circles on various semiconductor process machine platforms

Kawasaki 3NS004S-C019 wafer pre aligner has reliable positioning and good cleaning performance, and is a core spare part for the front-end transfer process of semiconductor machines.

Kawasaki 3NS004S-C019晶圆预对准器 产品展示

视频展示

其他产品

PPC907BE101 3BHE024577R0101 变频器
TRICONEX 3503E 模拟量输入模块
DS200DDTBG1A 直流电源模块

英文产品

 CI851 3BSE018116R1 Processor module
 CI860K01 3BSE032444R1 HSE Interface
 DAPI100 3AST000929R109 Redundant module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218