Novellus Systems BB10-155942波纹管执行器

Novellus Systems  BB10-155942波纹管执行器  

1.产 品 资 料 介 绍：

Novellus Systems  BB10-155942波纹管执行器   产品英文介绍

Novellus Systems BB10-155942 bellows actuator, a driving component for lifting and lowering the wafer base in the Novellus chamber, relies on metal bellows to maintain vacuum sealing.

Product Features

1. The metal bellows can expand and contract without leaking vacuum during lifting and lowering

2. The height adjustment of the base is fine and the positioning is stable

3. Resistant to plasma corrosion and suitable for deposition chamber environment

4. Built in limit to prevent overtravel collision with components

5. Vacuum and atmospheric space are isolated from each other to reduce particle pollution

6. Equipped with position feedback, real-time monitoring of the base position

7. Flange standard, easy to disassemble and replace

8. It can buffer vibrations and reduce the impact on wafer processes

9. Small displacement drift during temperature changes

10. It can monitor the deformation of corrugated pipes and detect potential hazards in advance

Application Areas

1. Novellus CVD thin film deposition chamber base lifting

2. Wafer lifting and placing actuator inside the vacuum chamber

3. Height adjustment module for film growth station

4. Vacuum transmission components for plasma deposition equipment

5. Wafer vacuum process lifting unit

The Novellus Systems BB10-155942 bellows actuator combines vacuum sealing and precision lifting, and is the core transmission spare part in thin film deposition chambers.

Novellus Systems  BB10-155942波纹管执行器  产品展示

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英文产品

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218