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TEL 2180-020298-V1加热器电源控制器

发布时间:2026-09-28人气:
  • TEL 2180-020298-V1加热器电源控制器
  • TEL 2180-020298-V1加热器电源控制器
  • TEL 2180-020298-V1加热器电源控制器

TEL 2180-020298-V1加热器电源控制器   

1.产 品 资 料 介 绍:

TEL 2180-020298-V1 加热器电源控制器
产品特点:
1.PID 闭环功率调节,控温响应快,维持晶圆台温度均匀稳定
2. 内置过载、过流与过热保护,防止加热元件损坏,保障机台安全
3. 半导体机台专用通讯接口,可与腔体主控实时交互温度数据
4. 高稳定性功率输出,温度漂移小,适配长时间连续制程
5. 标准化板卡结构,插拔式安装,现场检修更换便捷
应用领域:
1.TEL 刻蚀设备晶圆基座加热功率控制
2. 半导体薄膜沉积腔体加热器驱动单元
3. 等离子工艺腔静电卡盘温控供电模块
4.8 寸晶圆制程机台原装备件替换
5. 半导体产线设备故障维修更换
6. 设备翻新项目加热回路配套组件
7. 研发实验机台晶圆加热台电源控制
8. 晶圆表面处理工艺温度管控单元
9. 半导体检测设备加热模块供电控制
10. 前道芯片制造腔体温控系统
这款半导体刻蚀设备配套的加热器电源控制器型号为 TEL 2180-020298-V1。

TEL 2180-020298-V1加热器电源控制器  产品英文介绍

TEL 2180-0202298-V1 Heater Power Controller

Product Features:

1. PID closed-loop power regulation, fast temperature control response, maintaining uniform and stable temperature of the crystal cone

2. Built in overload, overcurrent, and overheating protection to prevent damage to heating elements and ensure machine safety

3. Dedicated communication interface for semiconductor machines, capable of real-time interaction of temperature data with the cavity controller

4. High stability power output, small temperature drift, suitable for long-term continuous processes

5. Standardized board structure, plug-in installation, convenient on-site maintenance and replacement

Application fields:

1. TEL etching equipment wafer base heating power control

2. Semiconductor thin film deposition chamber heater driving unit

3. Temperature control and power supply module for plasma process chamber electrostatic chuck

Replacement of original spare parts for 4.8-inch wafer processing machines

5. Maintenance and replacement of semiconductor production line equipment faults

6. Heating circuit supporting components for equipment renovation project

7. Research and development of experimental machine platform, crystal circle heating platform, power control

8. Temperature control unit for wafer surface treatment process

9. Power supply control for heating module of semiconductor testing equipment

10. Front chip manufacturing chamber temperature control system

The model of the heater power controller that comes with this semiconductor etching equipment is TEL 2180-0202298-V1.

TEL 2180-020298-V1加热器电源控制器  产品展示

2180-020298-V1.webp (1).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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