Ebara ETC010MA涡轮分子泵控制器

Ebara ETC010MA涡轮分子泵控制器   

1.产 品 资 料 介 绍：

Ebara ETC010MA涡轮分子泵控制器  产品英文介绍

Ebara ETC010MA Turbomolecular Pump Controller

Product Features:

1. Precise speed closed-loop control, stable driving of molecular pump, maintaining stable chamber vacuum degree

2. Integrated multiple protections, with overcurrent, overheating, and pump body abnormal shutdown alarm functions

3. Supports RS232 communication and IO signal interaction, and can be connected to the main control system of semiconductor machines

4. Compact rack design, compact size, easy to install and arrange in equipment cabinets

5. Real time collection of pump operation data, visualization of speed and temperature status, convenient troubleshooting

Application fields:

6. Drive control of semiconductor etching machine turbine molecular pump

7. PVD thin film deposition chamber high vacuum system matching

8. CVD process chamber molecular pump start stop and status monitoring

9. Control of wafer transfer load lock vacuum unit

10. Replacement and maintenance of spare parts for semiconductor production line molecular pumps

11. High vacuum chamber pump group drive for analytical instruments

12. Vacuum control system for semiconductor equipment renovation project

13. Power supply control for molecular pumps in research and development experimental vacuum machines

14. Vacuum circuit control unit for ion implantation equipment

15. High vacuum environment pump body speed control management of coating equipment

The model of the turbo molecular pump controller used for driving and controlling vacuum molecular pumps is Ebara ETC010MA.

Ebara ETC010MA涡轮分子泵控制器 产品展示

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其他产品

Bently 3500/44M 176449-03 振动监控器
BENTLY 3500-44-01-00 输出模块
Woodward 5441-693 数字控制器 

英文产品

 YPP109A YT204001-HS DC input card
 YPQ201A YT204001-KA DC output module
 YPQ202A YT204001-KB Voltachannel module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218