1.产 品 资 料 介 绍：
VAT 65048-JH52-AGD1闸阀电机 产品英文介绍
VAT 65048-JH52-AGD1 gate valve motor
Product Features
Stepper motor drives precise and stable control of valve plate swing opening
Built in position feedback real-time feedback valve opening signal adaptation for vacuum pressure regulation
Low dust motion structure meets the requirements of semiconductor clean vacuum working conditions
Equipped with fault protection, power-off can maintain valve safety status
Standardized electrical interface adaptation machine control system with easy disassembly and assembly
Application Areas
Vacuum pressure regulation control of semiconductor etching chamber
PVD coating chamber vacuum pipeline throttling control
CVD process chamber vacuum isolation valve drive unit
Vacuum on-off control of wafer load lock chamber
Replacement and maintenance of spare parts for vacuum valves in semiconductor production lines
Refurbishment and renovation of chip equipment with vacuum execution components
Research and development of experimental vacuum equipment pressure control unit
Drive control of vacuum pipeline valve for ion implantation machine
Vacuum chamber pressure control of wafer cleaning equipment
Adjustment of high vacuum valve opening in optical coating equipment
The motor model for this gate valve used for pressure regulation in semiconductor vacuum chambers is VAT 65048-JH52-AGD1.
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| PMB33C-20101-03 | AOT150 | N31HRLG-LNK-NS-00 |
| PMB33C-20101-02 | AMAT 0100-01976 | N43HRFN-LNK-NS-00 |
| PMB33C-20101-01 | NTRL02A | PFCL301E 0.2KN 3BSE016580R200 |
| PMB33C-20101-00 | NTCS02 | PFRL 101A |
| PMB33C-20100-03 | NKTU013 | P21NRXC-LNN-NS-00 |
| PMB33C-20100-02 | AMAT 0100-76046 | 57160001-NR DSTD 302 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
