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YASKAWA XU-DSCC0200-E伺服驱动器

发布时间:2026-09-28人气:
  • YASKAWA XU-DSCC0200-E伺服驱动器
  • YASKAWA XU-DSCC0200-E伺服驱动器
  • YASKAWA XU-DSCC0200-E伺服驱动器

YASKAWA XU-DSCC0200-E伺服驱动器  

1.产 品 资 料 介 绍:

YASKAWA XU-DSCC0200-E 伺服驱动器
产品特点
高响应位置闭环控制实现微米级定位运动平稳
内置振动抑制算法降低机台运行抖动保护晶圆
具备过载过压过热报警保护保障机台连续运行
支持高速总线通讯可快速对接半导体设备主控系统
紧凑板卡式结构拆装方便便于现场备件更换
应用领域
半导体晶圆搬运机械手运动驱动控制
晶圆升降平台伺服动力驱动单元
PVD 镀膜设备腔体位移机构控制
等离子刻蚀机台载台伺服驱动
半导体产线伺服备件替换维修
芯片设备翻新改造配套运动控制
研发实验机台精密位移平台驱动
晶圆检测设备样品传输机构控制
离子注入设备片盒传送伺服管控
抛光设备精密载台位置调节
这款用于半导体精密运动控制的伺服驱动器型号为 YASKAWA XU-DSCC0200-E。

YASKAWA XU-DSCC0200-E伺服驱动器  产品英文介绍

YASKAWA XU-DSCC0200-E servo drive

Product Features

High response position closed-loop control achieves smooth micro level positioning motion

Built in vibration suppression algorithm reduces machine operation jitter and protects wafers

Equipped with overload, overvoltage, and overheating alarm protection to ensure continuous operation of the machine

Supports high-speed bus communication for quick integration with semiconductor equipment control systems

The compact card structure is easy to disassemble and assemble, making it convenient for on-site replacement of spare parts

Application Areas

Motion Drive Control of Semiconductor Wafer Handling Robot

Wafer lifting platform servo power drive unit

Control of displacement mechanism for PVD coating equipment cavity

Plasma etching machine stage servo drive

Replacement and maintenance of servo spare parts for semiconductor production lines

Refurbishment and renovation of chip equipment with accompanying motion control

Research and development of precision displacement platform drive for experimental machines

Control of sample transfer mechanism for wafer testing equipment

Ion implantation equipment wafer box conveying servo control

Precision stage position adjustment of polishing equipment

The servo drive model for semiconductor precision motion control is YASKAWA XU-DSCC0200-E.

YASKAWA XU-DSCC0200-E伺服驱动器 产品展示

XU-DSCC0200-E.webp (2).jpg

视频展示


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英文产品

 3ASC25H705-7 Logic control module
 3ASC25H705 Channel input module
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PMB33C-20100-03NKTU013P21NRXC-LNN-NS-00
PMB33C-20100-02AMAT 0100-7604657160001-NR DSTD 302

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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