1.产 品 资 料 介 绍：
Varian E19290400脉冲电源驱动模块 产品英文介绍
Varian E19290400 Pulse Power Drive Module
Product Features
Stable pulse waveform output, precise timing to ensure consistency of ion implantation process
Built in multiple circuit protection with overvoltage, overcurrent, and overheating fault detection function
Support machine signal communication for remote adjustment of pulse parameters and power output
The integrated design of the board has good heat dissipation performance and is suitable for long-term continuous process operation
The plug-in installation structure is convenient for on-site disassembly, maintenance, and spare parts replacement
Application Areas
Pulse power drive control of semiconductor ion implantation machine
Control of power signal for wafer doping process chamber
Ion source excitation pulse power supply unit
Replacement and maintenance of spare parts for semiconductor production line power supply
Refurbishment and renovation of chip equipment with accompanying driver components
Research and development of experimental ion implantation equipment with pulse power supply
High energy ion beam process power control module
Power driver for wafer surface modification treatment
Pulse power supply for ion analysis instruments
Pulse circuit control of vacuum ion process equipment
The model of the pulse power drive module used for pulse power control in ion implantation equipment is Varian E19290400.
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| PMB33C-20200-03 | 07PT40 | 57120001-LK DSTY 110 |
| PMB33C-20200-02 | 07AB90-S | N43HRFM-LNK-NS-00 |
| PMB33C-20200-01 | ECZ | 57120001-U DSAI 150 |
| PMB33C-20200-00 | NKLS020 | PFTL101BER 20.0KN |
| PMB33C-20116-03 | AMAT 0100-09058 | M22NRXA-JDF-M1-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
