1.产 品 资 料 介 绍：
Inficon 924-601-G1气体分析仪 产品英文介绍
Inficon 924-601-G1 gas analyzer
Product Features
Residual gas mass spectrometry detection can identify various process gas components and impurities
High sensitivity detection can detect trace gas leaks and chamber pollutants
Real time collection of voltage divider data to support endpoint judgment in semiconductor processes
The digital communication interface can be directly connected to the machine control system to upload data
Modular sensor components facilitate on-site maintenance and replacement, reducing downtime
Application Areas
Online monitoring of gas composition in semiconductor etching chamber process
Impurity detection in vacuum environment of PVD coating chamber
Analysis of Gas Composition in CVD Thin Film Deposition Process
Vacuum chamber leak detection and residual pollutant investigation
Replacement and maintenance of spare parts for gas analyzers in semiconductor production lines
Refurbishment and renovation of chip equipment with supporting gas monitoring unit
Research and development of experimental vacuum equipment for gas component detection
Identification of End Point Signal in Plasma Process
Monitoring of exhaust gas composition in wafer cleaning chamber
Ion implantation equipment vacuum chamber gas monitoring
The gas analyzer model for detecting gas components in semiconductor vacuum chambers is Inficon 924-601-G1.
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| PMB33C-00216-00 | AMAT 0100-20164 | K9033-015 K9033-015 ABB |
| PMB33C-00214-03 | PHBRMU10010000 | 57120001-FX DSAI 160 |
| PMB33C-00214-02 | 70 AA 02a-E | PFRL101C 0.5KN 3BSE023316R0502 |
| PMB33C-00214-01 | IIMPM02 | 57120001-PG DSXW 110 |
| PMB33C-00214-00 | IMMFP11 | M22NSHS-LNN-NS-02 |
| PMB33C-00201-03 | NKMP03 | 57120001-LE DSAI 135 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
