1.产 品 资 料 介 绍：
Hitachi 1-809004-C涡轮分子泵 产品英文介绍
Hitachi 1-809004-C Turbomolecular Pump
Product Features
Oil free high-speed rotor structure has high pumping efficiency and can quickly establish a high vacuum environment
High precision of rotor dynamic balance, low operating vibration, and reduced particle pollution in the cavity
Built in speed and temperature monitoring provides real-time feedback on the operating status of the pump body
Integrated multiple protections with overload abnormal shutdown protection function
Compact pump body structure suitable for narrow installation space of semiconductor machines
Application Areas
High vacuum environment generated in semiconductor etching chamber
PVD thin film deposition chamber vacuum maintenance
Gas extraction and vacuum control in CVD process chamber
Rapid establishment of vacuum in wafer load lock chamber
Replacement and maintenance of spare parts for molecular pumps in semiconductor production lines
Refurbishment and renovation of chip equipment, vacuum system matching
Research and development of experimental vacuum equipment for high vacuum acquisition
Vacuum maintenance of ion implantation equipment chamber
Vacuum coating equipment suction unit
Surface analysis instrument ultra-high vacuum chamber pumping
The model of this turbo molecular pump used for high vacuum acquisition in semiconductor process chambers is Hitachi 1-809004-C.
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| PMB33C-00216-00 | AMAT 0100-20164 | K9033-015 K9033-015 ABB |
| PMB33C-00214-03 | PHBRMU10010000 | 57120001-FX DSAI 160 |
| PMB33C-00214-02 | 70 AA 02a-E | PFRL101C 0.5KN 3BSE023316R0502 |
| PMB33C-00214-01 | IIMPM02 | 57120001-PG DSXW 110 |
| PMB33C-00214-00 | IMMFP11 | M22NSHS-LNN-NS-02 |
| PMB33C-00201-03 | NKMP03 | 57120001-LE DSAI 135 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
