1.产 品 资 料 介 绍：
Edwards PT59-ZS-Z00涡轮控制器 产品英文介绍
Edwards PT59-ZS-Z00 Turbine Controller
Product Features
Accurate control of molecular pump speed to maintain stable chamber vacuum
Real time monitoring of abnormal operation status of the pump body and timely alarm
Multiple protection functions prevent damage to the pump body
Support remote monitoring through communication with the machine controller
Small in size, easy to install and maintain
Application Areas
Semiconductor etching equipment driven by molecular pump
PVD coating chamber vacuum pump control
CVD process chamber molecular pump start stop monitoring
Wafer load lock vacuum unit control
Replacement of spare parts for the production line turbine controller
Equipment renovation vacuum system matching
Experimental vacuum equipment molecular pump control
Vacuum pump management for ion implantation equipment
Vacuum coating machine exhaust system control
High vacuum pump drive for analytical instruments
The model of this turbine controller used for driving and controlling vacuum molecular pumps is Edwards PT59-ZS-Z00.
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| PMB33C-00201-02 | INNPM12 | PFRL101B 1.0KN 3BSE023315R0004 |
| PMB33C-00201-01 | IPFLD24 | 57160001-NL DSTD 301 |
| PMB33C-00201-00 | PU519 3BSE018681R1 | P22NRXA-LDS-NS-02 |
| PMB33C-00200-03 | NHSS01 | N31HRLJ-LNK-NS-00 |
| PMB33C-00200-02 | AMAT 0100-0075 | M22NRXC-LNN-NS-00 |
| PMB33C-00200-01 | AMAT 0100-90863 | 1SAP212200R0001 |
| PMB33C-00200-00 | BI1021 | 5730030-A DSAI 110 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
