Seiko Seiki SCU-P027PRT3涡轮分子控制器
1.产 品 资 料 介 绍：
Seiko Seiki SCU-P027PRT3涡轮分子控制器 产品英文介绍
Seiko SCU-P027PRT3 Turbomolecular Pump Controller
Product Features
Precise control of pump speed to maintain stable chamber vacuum
Real time monitoring of abnormal pump body status and automatic alarm
Multiple circuit protection to prevent damage to the pump body
Support remote control through docking with the machine master controller
Intuitive panel operation, easy disassembly and maintenance
Application Areas
Semiconductor etching equipment driven by molecular pump
PVD coating chamber vacuum control
CVD process chamber molecular pump start stop monitoring
Wafer load lock vacuum unit control
Replacement of spare parts for the production line turbine controller
Equipment renovation vacuum system matching
Experimental vacuum equipment molecular pump control
Vacuum pump management for ion implantation equipment
Vacuum coating machine exhaust system control
High vacuum pump drive for analytical instruments
The model of this turbo molecular pump controller used for driving and controlling vacuum molecular pumps is Seiko SCU-P027PRT3.
Seiko Seiki SCU-P027PRT3涡轮分子控制器 产品展示
视频展示
其他产品
PROSOFT MVI56E-MCMR 通讯模块
IC695CPU320-HS 中央处理器模块
PROSOFT MVI56-101S 输入输出模块
VMIVME7740 Semiconductor module
HIMA F3331 Sequence control module
HIMA X-BASE-PLATE-18-01 Logic control module
| PMB33C-00201-02 | INNPM12 | PFRL101B 1.0KN 3BSE023315R0004 |
| PMB33C-00201-01 | IPFLD24 | 57160001-NL DSTD 301 |
| PMB33C-00201-00 | PU519 3BSE018681R1 | P22NRXA-LDS-NS-02 |
| PMB33C-00200-03 | NHSS01 | N31HRLJ-LNK-NS-00 |
| PMB33C-00200-02 | AMAT 0100-0075 | M22NRXC-LNN-NS-00 |
| PMB33C-00200-01 | AMAT 0100-90863 | 1SAP212200R0001 |
| PMB33C-00200-00 | BI1021 | 5730030-A DSAI 110 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
