1.产 品 资 料 介 绍：
Edwards B75301000XS涡轮分子泵 产品英文介绍
Edwards B75301000XS Turbomolecular Pump
Product Features
Fast pumping speed can quickly establish a high vacuum environment
Reduce particle pollution in the chamber with minimal vibration during operation
Real time monitoring of speed and temperature status
Equipped with overload protection and capable of stopping in case of abnormal conditions
The pump body has a compact structure, making it convenient for equipment installation
Application Areas
High vacuum acquisition of semiconductor etching chamber
PVD coating chamber vacuum maintenance
CVD process chamber gas extraction
Vacuum extraction of wafer load lock chamber
Replacement of spare parts for production line turbo molecular pump
Equipment renovation vacuum system matching
Experimental vacuum equipment for high vacuum acquisition
Vacuum maintenance of ion implantation equipment chamber
Vacuum coating equipment suction unit
Surface analysis instrument cavity extraction
The model of the turbo molecular pump used for high vacuum acquisition in semiconductor process chambers is Edwards B75301000XS.
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| PMB33C-00201-02 | INNPM12 | PFRL101B 1.0KN 3BSE023315R0004 |
| PMB33C-00201-01 | IPFLD24 | 57160001-NL DSTD 301 |
| PMB33C-00201-00 | PU519 3BSE018681R1 | P22NRXA-LDS-NS-02 |
| PMB33C-00200-03 | NHSS01 | N31HRLJ-LNK-NS-00 |
| PMB33C-00200-02 | AMAT 0100-0075 | M22NRXC-LNN-NS-00 |
| PMB33C-00200-01 | AMAT 0100-90863 | 1SAP212200R0001 |
| PMB33C-00200-00 | BI1021 | 5730030-A DSAI 110 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
