1.产 品 资 料 介 绍：
Seren 9600540003射频电源模块 产品英文介绍
Seren 9600540003 RF power module
Product Features
High output power regulation accuracy, low RF signal harmonics
Built in multiple protection mechanisms including overheat overload standing wave protection
Support pulse output mode for flexible control of process timing
Solid state amplification architecture has fast response speed and strong stability during operation
Compatible with digital and analog communication for easy integration and control on the upper computer
Product application areas
Semiconductor etching process equipment
Thin film deposition coating equipment
Plasma cleaning equipment
Photovoltaic cell processing equipment
Surface treatment of optical components
Laboratory Plasma Research Platform
Surface modification treatment of materials
Wafer debonding process system
Vacuum process supporting equipment
Precision electronic manufacturing production line
Product Specifications
Working frequency 13.56MHz
Continuous adjustable output power
Cooling method: Water cooling for heat dissipation
Seren 9600540003 RF power module outputs pure and stable RF energy, suitable for various plasma process equipment to meet the precision process requirements of high-end manufacturing
视频展示
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| 6DD2920-0AW0 | CACR-SR30SBBFY100 | 3BHB003688R0101 |
| 6DD2920-0AV3 | CACR-PR01AC3ER | 44A751101-G01 |
| 6DD2920-0AV1 | CACR-UIR05050FD | 6ES5513-3LB11 |
| 6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
| 6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
| 6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
| 6DD2920-0AS1 | CACR-IR44SEB | UCD240A101 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
