1.产 品 资 料 介 绍：
AMAT 0190-47186线性执行器总成 产品英文介绍
AMAT 0190-47186 Linear actuator assembly
Product Features
High repeatability accuracy of ball screw transmission positioning
Built in position feedback sensor provides real-time displacement data feedback
Vacuum compatible structure adapted to semiconductor cavity environment
The integrated assembly design facilitates quick disassembly and replacement of the entire machine
Smooth operation with low jitter suitable for precise wafer displacement control
Product application areas
Semiconductor wafer processing equipment
Vacuum process chamber displacement mechanism
Wafer transfer lifting platform
Motion unit of thin film deposition equipment
Plasma etching machine execution component
Semiconductor cleaning equipment
Precision detection and alignment equipment
CMP chemical mechanical polishing equipment
Wafer debonding process equipment
Semiconductor Automation Platform System
Product Specifications
Drive type: servo motor drive
Transmission Structure Precision Ball Screw
The working environment supports vacuum working conditions
The AMAT 0190-47186 linear actuator assembly is designed specifically for semiconductor equipment to achieve high-precision linear motion, ensuring stable and reliable wafer process operation.
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| 6DD2920-0AW0 | CACR-SR30SBBFY100 | 3BHB003688R0101 |
| 6DD2920-0AV3 | CACR-PR01AC3ER | 44A751101-G01 |
| 6DD2920-0AV1 | CACR-UIR05050FD | 6ES5513-3LB11 |
| 6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
| 6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
| 6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
| 6DD2920-0AS1 | CACR-IR44SEB | UCD240A101 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
