1.产 品 资 料 介 绍：
AMAT 0195-14157控制器模块 产品英文介绍
AMAT 0195-14157 Controller Module
Product Features
High precision in multi-channel analog and digital signal acquisition and conversion
Built in signal isolation circuit to resist electromagnetic interference from cavities
Support high-speed backplane communication to achieve real-time process linkage
Modular card structure rack for quick insertion and replacement
Equipped with self checking function for easy on-site troubleshooting
Product application areas
Semiconductor thin film deposition equipment
Plasma etching process chamber
Vacuum chamber signal monitoring system
Wafer temperature closed-loop control system
Gas flow controller signal docking
Vacuum interlock management of semiconductor equipment
Logic control of wafer transfer action
200mm 300mm process platform supporting
Semiconductor RTP heat treatment equipment
Clean workshop process measurement and control unit
Product Specifications
Signal type: 16 bit analog plus digital I/O
Supply voltage 5V DC and 24V DC
Installation method: Rack mounted card
The AMAT 0195-14157 controller module, as the core component of the cavity signal interface, is responsible for data exchange between sensors and actuators inside the semiconductor device cavity to ensure stable operation of the wafer process
AMAT 0195-14157控制器模块 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
