1.产 品 资 料 介 绍:
Screen PTGU-001压力控制板卡 产品英文介绍
Screen PTGU-001 pressure control board is a specialized pressure control board for Screen coating and developing equipment, responsible for collecting and closed-loop regulating pipeline pressure and liquid pressure.
Product Features
1. Compatible with Screen semiconductor coating and developing equipment, with stable communication protocol matching.
2. High pressure sampling accuracy, which can stably maintain the pressure of the process pipeline.
3. Built in pressure over limit alarm, timely feedback of pipeline abnormalities.
4. Signal isolation circuit to resist electromagnetic interference in clean workshops.
5. Slot type installation, easy and fast disassembly and replacement.
Application Areas
1. Pressure regulation of Screen wafer coating and developing equipment.
2. Liquid supply system for semiconductor lithography process.
3. Control the spraying pressure of crystal round photoresist.
4. Stable pressure control of the developer conveying pipeline.
5. Clean process pneumatic circuit monitoring.
6. Automated equipment for wafer pre-processing.
7. Lithography supporting liquid supply module control.
8. Coating production line in semiconductor factory.
9. Pressure monitoring of micro nano processing technology.
10. Maintenance and matching of lithography equipment spare parts.
The Screen PTGU-001 pressure control board ensures stable spraying pressure of the photoresist solution and is a key spare part for the coating and development process.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




