KLA Tencor 073-652839-00控制器模块

KLA-Tencor  073-652839-00控制器模块

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 073-652839-00 控制器模块介绍

该模块是KLA Tencor公司用于晶圆表面检测设备中的核心控制单元，通常称为 RIF Board（Reflective Imaging Filter Board），主要集成在多种 Surfscan 系列检测仪器（如 Surfscan 2132、2138、2139、eS31等）中。

主要功能

1. 图像采集与处理
   该模块负责接收和处理来自晶圆表面反射光的高分辨率图像数据。通过先进的信号处理技术，模块能有效增强图像质量，辅助后端系统进行精准缺陷检测和分类。

2. 反射式成像滤光器控制
   模块控制反射式成像滤光器的位置和状态，实现不同波长的光学滤波功能，以便针对不同检测需求调整成像参数，提升检测灵敏度和准确度。

3. 多模块通信接口
   该控制器模块具备多种通信接口，能够实现与设备内其他模块（如数据采集模块、主控制板、存储单元等）之间的高速数据交换，保证检测系统整体协同和信息流畅。

4. 系统稳定性与安全保障
   设计时注重抗干扰能力和稳定性，保障设备长时间连续工作时的可靠性，减少因电子故障导致的停机风险。

5. 设备维护与升级支持
   该模块结构设计模块化，方便维护人员快速更换或升级，极大降低设备维护时间和复杂度，提升生产线整体效率。

应用领域

• 半导体晶圆缺陷检测
  作为晶圆检测设备中的重要组件，该模块广泛应用于半导体制造过程中晶圆表面缺陷的实时检测和质量控制，帮助厂商保证产品良率。

• 光学成像系统控制
  控制成像滤光器，优化光学检测条件，适应不同类型晶圆材料和检测工艺。

• 高精度检测设备系统集成
  作为系统关键控制单元，参与整个检测仪器的电子信息处理和协调管理。

英文资料：

Introduction to KLA Tencor 073-652839-00 Controller Module

This module is the core control unit used by KLA Tencor for wafer surface inspection equipment, commonly referred to as RIF Board（Reflective Imaging Filter Board）， Mainly integrated into various Surfscan series detection instruments (such as Surfscan 2132, 2138, 2139, eS31, etc.).

major function 

Image acquisition and processing

This module is responsible for receiving and processing high-resolution image data from reflected light on the wafer surface. Through advanced signal processing technology, the module can effectively enhance image quality and assist backend systems in precise defect detection and classification.

Reflective imaging filter control

The module controls the position and state of the reflective imaging filter to achieve optical filtering functions at different wavelengths, in order to adjust imaging parameters for different detection needs and improve detection sensitivity and accuracy.

Multi module communication interface

The controller module has multiple communication interfaces, which can achieve high-speed data exchange with other modules within the device (such as data acquisition module, main control board, storage unit, etc.), ensuring overall coordination and smooth information flow of the detection system.

System stability and security assurance

When designing, attention should be paid to anti-interference ability and stability to ensure the reliability of equipment during long-term continuous operation and reduce the risk of downtime caused by electronic failures.

Equipment maintenance and upgrade support

The modular design of this module structure facilitates quick replacement or upgrade by maintenance personnel, greatly reducing equipment maintenance time and complexity, and improving the overall efficiency of the production line.

application area 

Semiconductor wafer defect detection

As an important component in wafer inspection equipment, this module is widely used for real-time detection and quality control of wafer surface defects in semiconductor manufacturing processes, helping manufacturers ensure product yield.

Optical imaging system control

Control imaging filters, optimize optical detection conditions, and adapt to different types of wafer materials and detection processes.

System integration of high-precision detection equipment

As a key control unit of the system, participate in the electronic information processing and coordinated management of the entire detection instrument.

2.产      品      展      示      

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