KLA-Tencor 710-610801-001单轴控制器
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-610801-001 单轴控制器
产品概述
KLA Tencor 710-610801-001 单轴控制器是半导体设备中专用于控制单个伺服轴（如平台、探头、镜头模块等）的高性能控制单元。它用于实现精准的单维运动控制，是晶圆检测、量测设备中不可或缺的子系统之一。
主要功能
单轴驱动与控制
控制伺服电机或步进电机的启动、速度、加减速曲线及精确位置，确保运动平台或执行部件达到设定目标。高精度反馈处理
支持编码器反馈输入，实现闭环控制，提高定位精度与稳定性。运动轮廓生成
根据输入命令生成平滑的运动路径（如梯形或S型速度曲线），适用于高精度、低震动的运动要求。接口与通讯支持
兼容标准的工业通讯接口（如RS-232、RS-485、CAN、PCI等），支持与主控系统进行数据交互与远程配置。
技术特性
实时控制核心：内置嵌入式处理器，具备高速控制循环与低延迟响应能力。
集成多种保护机制：包括过流保护、过压保护、限位开关处理及故障自诊断。
微步控制能力：支持微步调制与分辨率调节，提升低速平稳性。
模块化设计：方便更换、维护与集成，适用于多种自动化控制环境。
典型应用领域
晶圆检测系统：控制光学模块或探测平台的单维运动，如聚焦调整、样本扫描。
量测设备：用于定位检测头或载片托盘，实现精确测量路径。
自动光学检测（AOI）系统：驱动镜头组移动以完成图像扫描。
精密平台控制：如激光聚焦模块、粒子检测平台等微米级移动控制。
英文资料：
KLA Tencor 710-610801-001 Single Axis Controller
product overview
The KLA Tencor 710-610801-001 single axis controller is a high-performance control unit specifically designed for controlling a single servo axis (such as a platform, probe, lens module, etc.) in semiconductor equipment. It is used to achieve precise one-dimensional motion control and is one of the indispensable subsystems in wafer inspection and measurement equipment.
major function
Single axis drive and control
Control the starting, speed, acceleration and deceleration curves, and precise position of servo motors or stepper motors to ensure that the motion platform or executing components achieve the set goals.
High precision feedback processing
Support encoder feedback input, achieve closed-loop control, and improve positioning accuracy and stability.
Motion contour generation
Generate smooth motion paths (such as trapezoidal or S-shaped velocity curves) based on input commands, suitable for high-precision, low vibration motion requirements.
Interface and communication support
Compatible with standard industrial communication interfaces such as RS-232, RS-485, CAN, PCI, etc., supporting data exchange and remote configuration with the main control system.
Technical Characteristics
Real time control core: Built in embedded processor with high-speed control loop and low latency response capability.
Integrate multiple protection mechanisms, including overcurrent protection, overvoltage protection, limit switch processing, and fault self diagnosis.
Microstep control capability: Supports microstep modulation and resolution adjustment to improve low-speed stability.
Modular design: convenient for replacement, maintenance, and integration, suitable for various automation control environments.
Typical application areas
Wafer inspection system: controls the single dimensional movement of optical modules or detection platforms, such as focus adjustment and sample scanning.
Measurement equipment: used for positioning detection heads or wafer trays to achieve precise measurement paths.
Automatic Optical Inspection (AOI) system: drives the lens group to move to complete image scanning.
Precision platform control: such as micro scale movement control for laser focusing modules, particle detection platforms, etc.
2.产 品 展 示
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