Novellus Systems A90-031-03故障检测模块
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems A90-031-03 故障检测模块 是一款专为 Novellus 半导体制造设备设计的诊断与保护模块，主要功能是实时监测设备内部各类子系统的运行状态，并在检测到异常时触发报警或停机信号，以确保工艺安全、设备稳定以及人员防护。
Novellus A90-031-03 故障检测模块的主要应用领域如下：
设备工艺监控系统
用于监测工艺过程中关键参数（如温度、压力、电流、气流等）是否处于安全范围内，一旦偏离，立即响应。执行器与电源监控
实时检查阀门、电加热器、泵浦等执行部件是否正常运行，防止异常运行造成损坏或工艺偏差。联锁控制支持
与联锁板或主控制器配合，当某一模块出现故障时，阻止设备启动或中断正在运行的工艺流程。多通道输入检测
模块通常支持多通道输入，可同时监测多个信号来源，例如多个传感器、继电器反馈点或状态检测位。报警系统接口
故障发生时可输出报警信号至上位系统或HMI界面，提示操作员进行处理，并可记录故障时间点用于维护分析。与控制系统集成
作为设备自动化系统的一部分，模块可通过数字信号或通信接口与主控制器同步，提升整机安全性与稳定性。适用于CVD/ALD/PVD等工艺平台
广泛用于 Novellus 的 Concept 系列、ALTUS 系列等设备中，为复杂工艺流程提供实时保护机制。维护与故障定位辅助
该模块支持自检或诊断输出功能，有助于工程师快速识别问题来源，缩短维修时间。
英文资料：
The Novellus Systems A90-031-03 fault detection module is a diagnostic and protection module designed specifically for Novellus semiconductor manufacturing equipment. Its main function is to monitor the operating status of various subsystems inside the equipment in real time, and trigger alarm or shutdown signals when abnormalities are detected to ensure process safety, equipment stability, and personnel protection.
The main application areas of the Novellus A90-031-03 fault detection module are as follows:
Equipment process monitoring system
Used to monitor whether key parameters (such as temperature, pressure, current, airflow, etc.) in the process are within the safe range, and respond immediately once they deviate.
Actuator and power monitoring
Real time inspection of valve, electric heater, pump and other executing components to ensure normal operation and prevent damage or process deviation caused by abnormal operation.
Interlocking control support
Cooperate with the interlocking board or the main controller to prevent the equipment from starting or interrupt the running process flow when a module fails.
Multi channel input detection
Modules typically support multi-channel inputs and can simultaneously monitor multiple signal sources, such as multiple sensors, relay feedback points, or status detection bits.
Alarm system interface
When a fault occurs, an alarm signal can be output to the upper system or HMI interface to prompt the operator to handle it, and the fault time point can be recorded for maintenance analysis.
Integration with control system
As a part of the equipment automation system, modules can synchronize with the main controller through digital signals or communication interfaces to enhance the safety and stability of the entire machine.
Suitable for CVD/ALD/PVD and other process platforms
Widely used in Novellus' Concept series, ALTUS series and other devices to provide real-time protection mechanisms for complex process flows.
Maintenance and fault location assistance
This module supports self checking or diagnostic output functions, which helps engineers quickly identify the source of problems and shorten repair time.
2.产 品 展 示
3.其他产品
4.其他英文产品
Asea EB0524B01 driver input power board
| PMB33E-10200-03 | AMAT 0100-03776 | LT 370c |
| PMB33E-10200-02 | INNIS21 | N31HRHH-LNK-NS-00 |
| PMB33E-10200-01 | 70 SK 32a-E | PWM3652-5458-4 |
| PMB33E-10200-00 | INNPM11 | 3BSE019300R1 DSRF 200 |
| PMB33E-10116-03 | IMCIS22 | 57160001-KG DSDP 160 |
| PMB33E-10116-02 | IMCOM03 | PFTL201CE 50.0KN 3BSE007913R51 |
| PMB33E-10116-01 | NTDO02 | 57160001-DF DSDI 301 |
| PMB33E-10116-00 | 70 FK01a | P21NSXC-LSS-NS-07 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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