TEL Tokyo Electron 2L81-000011-11接口模块
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 2L81-000011-11
产品类型： 接口模块（Interface Module）
应用对象： Tokyo Electron 半导体设备系统中的控制与通信接口子系统
一、产品功能简述：
2L81-000011-11 接口模块是 Tokyo Electron 专为其晶圆处理和工艺设备开发的电子接口模块，主要用于实现主控系统与各种设备子系统之间的信号转换、通信中继和逻辑控制，适用于高精度、高可靠性的工业控制场景。
二、主要应用领域：
半导体制造设备控制系统
安装于 Tokyo Electron 的核心设备中（如CVD、Etcher、PVD等），用于主控制板与执行部件（阀门、马达、传感器）之间的信号通信。
I/O信号中继与转接
负责设备内数字输入/输出（DI/DO）、模拟量输入/输出（AI/AO）等信号的统一接入与转发，实现模块化控制架构。
设备间通信管理
在分布式系统结构中，用于不同控制子系统之间的信号同步和数据通信，如晶圆处理单元与真空控制单元之间的接口。
运动控制与位置反馈系统
适用于晶圆传送系统、对准平台、机械臂等运动单元的控制与信号反馈回路。
洁净室自动化设备接口
可集成于洁净环境下的自动化装置，确保控制信号在无干扰、高稳定性的条件下准确传输。
设备维护和状态监控
通过接口模块采集设备运行参数与诊断信息，实现远程监控与维护功能。
英文资料：
Product model: TEL Tokyo Electron 2L81-000011-11
Product type: Interface Module
Application object: Control and Communication Interface Subsystem in Tokyo Electron Semiconductor Equipment System
1、 Product Function Description:
The 2L81-000011-11 interface module is an electronic interface module developed by Tokyo Electron specifically for its wafer processing and process equipment. It is mainly used to achieve signal conversion, communication relay, and logic control between the main control system and various equipment subsystems, and is suitable for high-precision and high reliability industrial control scenarios.
2、 Main application areas:
Semiconductor manufacturing equipment control system
Installed in the core equipment of Tokyo Electron (such as CVD, Etcher, PVD, etc.), it is used for signal communication between the main control board and the executing components (valves, motors, sensors).
I/O signal relay and transfer
Responsible for the unified access and forwarding of digital input/output (DI/DO), analog input/output (AI/AO) and other signals within the equipment, achieving a modular control architecture.
Communication management between devices
In a distributed system architecture, it is used for signal synchronization and data communication between different control subsystems, such as the interface between wafer processing units and vacuum control units.
Motion Control and Position Feedback System
Suitable for control and signal feedback loops of motion units such as wafer transfer systems, alignment platforms, and robotic arms.
Interface of cleanroom automation equipment
An automated device that can be integrated into a clean environment to ensure accurate transmission of control signals under interference free and high stability conditions.
Equipment maintenance and status monitoring
Collect device operating parameters and diagnostic information through interface modules to achieve remote monitoring and maintenance functions.
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
