TEL Tokyo Electron E244-010015-11中央控制器模块

TEL Tokyo Electron E244-010015-11中央控制器模块

1.产 品 资 料 介 绍：

中文资料：

产品名称： TEL Tokyo Electron E244-010015-11
类型： 中央控制器模块（Central Controller Module）
制造商： Tokyo Electron Ltd.（TEL）

一、主要应用领域

1. 半导体制造设备控制系统

   • 用于TEL品牌的干法刻蚀（Etch）、CVD、ALD、清洗、光刻等设备中，负责设备核心控制与流程管理。

2. 多模块协调与通信管理

   • 控制各子系统如气体供应系统、真空腔体、温控模块、运动组件等的协同运行；

   • 通过总线接口或自定义通信协议与各控制板进行高效数据交互。

3. 工艺流程逻辑控制

   • 实现自动工艺流程的时序控制和执行判断；

   • 保证工艺顺序、操作精度和参数一致性，提升成品率。

4. 实时数据处理与报警联动

   • 对压力、温度、流量、电流等传感器数据进行实时采集与处理；

   • 根据逻辑判断结果触发报警或联动保护机制（如关闭电源、气体切断等）。

5. 设备运行日志与系统诊断

   • 记录运行过程中的关键参数、操作步骤、故障信息；

   • 提供历史回溯与运维诊断支持，有助于故障分析和工艺优化。

6. 通信与远程接口支持

   • 支持与上位机通信（如SECS/GEM协议），用于生产线集中管理和远程监控；

   • 可集成至MES系统，实现制造信息化与自动化。

英文资料：

Product Name: TEL Tokyo Electron E244-010015-11

Type: Central Controller Module

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Main application areas

Semiconductor manufacturing equipment control system

Responsible for equipment core control and process management in dry etching (Etch), CVD, ALD, cleaning, photolithography, and other equipment used for TEL brand.

Multi module coordination and communication management

Control the coordinated operation of various subsystems such as gas supply system, vacuum chamber, temperature control module, motion components, etc;

Efficient data exchange with various control boards through bus interfaces or custom communication protocols.

Process logic control

Realize timing control and execution judgment of automatic process flow;

Ensure process sequence, operational accuracy, and parameter consistency to improve yield.

Real time data processing and alarm linkage

Real time collection and processing of sensor data such as pressure, temperature, flow rate, and current;

Trigger an alarm or linkage protection mechanism based on logical judgment results (such as turning off power, cutting off gas, etc.).

Equipment operation log and system diagnosis

Record key parameters, operating steps, and fault information during operation;

Providing historical tracing and operational diagnostic support helps with fault analysis and process optimization.

Communication and remote interface support

Support communication with upper computer (such as SECS/GEM protocol) for centralized management and remote monitoring of production lines;

Can be integrated into MES system to achieve manufacturing informatization and automation.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218