TEL Tokyo Electron 11-14259-01热力板
1.产 品 资 料 介 绍：
TEL Tokyo Electron 11-14259-01 热力板（Heater Plate） 是一款专用于半导体制造设备中的加热模块部件，主要作用是在工艺腔体中对晶圆进行均匀加热，以满足特定工艺条件下对温度控制的精度要求。它通常安装于反应腔体、加热台（hot chuck）或其他热处理组件中，是设备温控系统的重要组成部分。
一、基本信息
产品型号： 11-14259-01
产品名称： 热力板 / 加热板（Heater Plate）
制造商： Tokyo Electron Ltd.（TEL）
类型： 工艺加热元件，用于高精度温控需求
二、主要功能
加热功能
对晶圆或工艺区域提供均匀、稳定的热源，支持设置不同温度区段。
温度控制接口
搭载热电偶（Thermocouple）或RTD等温度传感器，配合温控系统实现闭环控制。
热均匀性保障
材料通常选用高导热性金属或陶瓷，表面处理精密，确保热分布均匀。
工艺支持
支持CVD、ALD、干法蚀刻、退火、预热等高温相关制程环节。
英文资料：
TEL Tokyo Electron 11-14259-01 Heater Plate is a heating module component specifically designed for semiconductor manufacturing equipment. Its main function is to uniformly heat wafers in the process chamber to meet the precision requirements for temperature control under specific process conditions. It is usually installed in the reaction chamber, hot chuck, or other heat treatment components and is an important component of the equipment temperature control system.
1、 Basic Information
Product Model: 11-14259-01
Product Name: Heater Plate
Manufacturer: Tokyo Electron Ltd. (TEL)
Type: Process heating element, used for high-precision temperature control requirements
2、 Main functions
Heating function
Provide a uniform and stable heat source for the wafer or process area, and support setting different temperature ranges.
Temperature control interface
Equipped with temperature sensors such as thermocouples or RTDs, and combined with a temperature control system to achieve closed-loop control.
Thermal uniformity guarantee
Materials are usually made of high thermal conductivity metals or ceramics, with precise surface treatment to ensure uniform heat distribution.
Process support
Support high-temperature related process steps such as CVD, ALD, dry etching, annealing, preheating, etc.
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
