TEL Tokyo Electron 3281-000019-15传感器组件

TEL Tokyo Electron  3281-000019-15传感器组件

1.产 品 资 料 介 绍：

产品名称：

Tokyo Electron (TEL) 3281-000019-15 传感器组件 — 产品应用领域详解

一、产品功能定位

3281-000019-15 传感器组件 是 Tokyo Electron（TEL）半导体设备中用于实时监测设备状态或工艺参数的关键检测模块。此类组件通常结合高精度传感器、电路板、外壳及通信接口组成，用于采集环境或设备内部特定物理量，为控制系统提供反馈数据，实现闭环控制与异常预警。

二、主要应用领域

1. 关键工艺参数实时监测

• 典型监测对象（根据组件编号推测）：

  • 温度（热电偶或RTD）

  • 压力（真空腔体、气路）

  • 位移/位置（机械臂、升降装置）

  • 气体流量或气氛检测（MFC旁路或传输路径）

• 设备类型：

  • 薄膜沉积设备（CVD、ALD、PVD）

  • 晶圆清洗设备、显影系统

  • 刻蚀设备（Etcher）

  • 晶圆搬运系统、Transfer Modules

2. 过程控制闭环反馈单元

• 功能特点：

  • 将采集到的信号通过模拟或数字方式传输给控制器模块（如 3M81 系列控制板）；

  • 与执行机构（如电磁阀、加热器、电机等）形成闭环系统，实现精准控制；

  • 可联动报警与保护机制，在异常状态下快速响应停机或切断电源。

英文资料：

Tokyo Electron (TEL) 3281-000019-15 Sensor Components - Product Application Field Detailed Explanation

1、 Product functional positioning

The 3281-000019-15 sensor component is a key detection module used in Tokyo Electron (TEL) semiconductor equipment for real-time monitoring of equipment status or process parameters. This type of component is usually composed of high-precision sensors, circuit boards, casings, and communication interfaces, used to collect specific physical quantities inside the environment or equipment, provide feedback data for the control system, and achieve closed-loop control and abnormal warning.

2、 Main application areas

1. Real time monitoring of key process parameters

Typical monitoring objects (inferred based on component numbers):

Temperature (thermocouple or RTD)

Pressure (vacuum chamber, gas path)

Displacement/position (robotic arm, lifting device)

Gas flow or atmosphere detection (MFC bypass or transmission path)

Equipment type:

Thin film deposition equipment (CVD, ALD, PVD)

Wafer cleaning equipment, developing system

Etcher equipment

Wafer handling system Transfer Modules

2. Process control closed-loop feedback unit

Functional features:

Transmit the collected signals to the controller module (such as the 3M81 series control board) through analog or digital means;

Form a closed-loop system with executing agencies (such as solenoid valves, heaters, motors, etc.) to achieve precise control;

It can be linked with alarm and protection mechanisms to quickly respond to shutdown or power cut off in abnormal states.

2.产      品      展      示      

3.其他产品

ASYST ETON ET866 94V-0 独立显卡

Advantech PCL-81601采集板

A-B 1794-IRT8XT 继电器输出模块

4.其他英文产品

LAM 810-800081-016 CPU motherb

Siemens 6ES7291-8GC00-0XA0 cartridge

Kollmorgen MMC-SD-0.5-230-D servo drive

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218