AMAT Applied Materials DIP-510-002互锁模块
1.产 品 资 料 介 绍：
AMAT Applied Materials DIP-510-002 互锁模块
核心功能
技术特点
典型应用
安装与维护建议
AMAT Applied Materials DIP-510-002互锁模块 英文资料：
AMAT Applied Materials DIP-510-002 Interlock Module
AMAT DIP-510-002 is a safety interlock module designed specifically for semiconductor manufacturing equipment. It is used to monitor the status of equipment doors, protective devices, and critical operating components, ensuring that the equipment operates under safe conditions and preventing safety risks caused by personnel misoperation or equipment abnormalities.
core functionality
Safety status monitoring: Real time monitoring of the opening and closing status of each safety door and protective cover of the equipment
Interlocking control logic: When the safety device is triggered (such as opening the cabin door), immediately cut off the power or process power supply in the dangerous area
Emergency stop integration: compatible with emergency stop button signals, achieving global safety control
Status feedback: Provide clear indicator lights or electrical signals to display the status of each interlocking point
Fault diagnosis: Built in self-test function, can quickly locate the fault interlock point
Technical Features
Safety level: Complies with SEMI S2 semiconductor equipment safety standards and supports SIL 2 safety level
Input channel: Multi channel design (usually 4-8 channels), capable of monitoring multiple interlocking points
Response time: millisecond level fast response, ensuring immediate protection in dangerous situations
Output type: safety relay output, supporting forced disconnection function
Electrical isolation: Electrical isolation between channels to prevent signal interference
Working environment: 0-50 ℃, suitable for semiconductor cleanrooms and internal equipment environments
Typical Applications
Etching/deposition equipment: monitor the opening and closing status of the reaction chamber door and maintenance door
Ion implantation machine: protective cover interlock and radiation safety control
Wafer Transfer System: Safe Area Protection for Automated Handling Mechanisms
Lithography equipment: Optical system maintenance door and laser safety interlock
Cleaning equipment: safety protection monitoring of chemical processing compartments
Installation and maintenance recommendations
Installation key points
Strictly follow safety regulations for wiring, distinguish between safety circuits and ordinary signals
Ensure reliable grounding and improve anti-interference ability
The installation location is convenient for observing the status indicator lights and maintenance operations
operation and maintenance
Regularly test the interlocking function and verify the emergency stop response
Clean the surface of the module to maintain good heat dissipation
Record interlocking triggering history and analyze potential safety risks
AMAT Applied Materials DIP-510-002互锁模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
