AMAT Applied Materials 0226-45365热电偶扫描仪

1.产 品 资 料 介 绍：

AMAT Applied Materials 0226-45365 热电偶扫描仪

核心功能

• 多通道数据采集：支持多路热电偶信号并行采集（通常 8-32 通道），同步监测不同区域温度
• 高精度测量：采用低温漂放大电路，确保宽温范围内的测量准确性
• 实时数据处理：高速 A/D 转换与数字滤波，提供稳定可靠的温度数据
• 温度异常报警：可设置各通道高低温阈值，超限时触发报警与控制信号
• 数据通信：支持与主控制器实时通信，集成于设备温控系统

技术特点

• 测量精度：±0.1℃（典型值），全量程误差≤0.2%
• 支持类型：兼容 K、J、T、E 等多种热电偶类型，可软件配置
• 采样速率：单通道最高 100Hz，多通道可分配采样频率
• 冷端补偿：内置高精度冷端补偿电路，消除环境温度影响
• 隔离保护：通道间电气隔离（通常 2.5kV 以上），抗干扰能力强
• 通信接口：工业以太网或 RS-485（支持 Modbus 等协议）
• 工作环境：0-60℃，适应设备内部或控制柜安装

典型应用

• 沉积设备：监测反应室壁、电极、加热台的温度分布
• 扩散炉 / 退火炉：硅片加热过程中的多点温度监控
• 刻蚀设备：射频腔体与极板的温度均匀性监测
• 光刻设备：光学系统与晶圆台的温度稳定性控制
• CMP 设备：研磨垫与晶圆的温度分布监测

AMAT Applied Materials 0226-45365热电偶扫描仪 英文资料：

AMAT Applied Materials 0226-45365 Thermocouple Scanner

AMAT 0226-45365 is a high-precision thermocouple scanner designed specifically for semiconductor manufacturing equipment. It is used to simultaneously collect and monitor temperature data from multiple thermocouple sensors, achieving temperature distribution monitoring and process closed-loop control in critical areas of the equipment.

core functionality

Multi channel data acquisition: supports parallel acquisition of multiple thermocouple signals (usually 8-32 channels), synchronously monitoring temperature in different areas

High precision measurement: using low-temperature drift amplification circuit to ensure measurement accuracy over a wide temperature range

Real time data processing: high-speed A/D conversion and digital filtering, providing stable and reliable temperature data

Temperature anomaly alarm: high and low temperature thresholds can be set for each channel, triggering alarms and control signals when exceeded

Data Communication: Supports real-time communication with the main controller and is integrated into the device temperature control system

Technical Features

Measurement accuracy: ± 0.1 ℃ (typical value), full range error ≤ 0.2%

Support types: Compatible with multiple thermocouple types such as K, J, T, E, etc., software configurable

Sampling rate: Single channel up to 100Hz, multi-channel can allocate sampling frequency

Cold end compensation: Built in high-precision cold end compensation circuit to eliminate the influence of environmental temperature

Isolation protection: Electrical isolation between channels (usually above 2.5kV), strong anti-interference ability

Communication interface: Industrial Ethernet or RS-485 (supporting protocols such as Modbus)

Working environment: 0-60 ℃, suitable for installation inside equipment or control cabinets

Typical Applications

Sedimentation equipment: monitoring the temperature distribution of the reaction chamber wall, electrodes, and heating table

Diffusion furnace/annealing furnace: multi-point temperature monitoring during silicon wafer heating process

Etching equipment: Temperature uniformity monitoring of RF cavity and electrode plate

Lithography equipment: temperature stability control of optical system and wafer stage

CMP equipment: temperature distribution monitoring of polishing pads and wafers

AMAT Applied Materials  0226-45365热电偶扫描仪 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218