AMAT Applied Materials  0120-90146量规控制器模块

1.产 品 资 料 介 绍：

AMAT Applied Materials 0120-90146 量规控制器模块

核心规格

功能特点

• 高精度测量与控制：采用先进的信号处理技术，确保测量数据准确可靠
• 多通道并行处理：可同时接入多路传感器，实现多参数同步监测
• 实时数据处理：高速采样与处理能力，及时响应工艺变化
• 灵活的控制策略：支持 PID 控制、自适应控制等多种算法
• 完善的故障诊断：具备通道故障检测和报警功能
• 历史数据存储：内置数据存储功能，便于工艺追溯与分析

典型应用

• 刻蚀过程中的膜厚监测与控制
• 化学气相沉积 (CVD) 工艺参数监控
• 化学机械抛光 (CMP) 表面轮廓测量
• 离子注入剂量均匀性监测
• 各种工艺设备的状态监测与数据采集

安装与维护要点

1. 安装注意事项：
   • 确保良好接地，减少电磁干扰
   • 模拟信号线与动力线分开布线
   • 预留足够的散热空间
2. 调试建议：
   • 先进行单点校准，确保各通道精度
   • 逐步增加测量点，验证系统稳定性
   • 优化控制参数，实现最佳控制效果
3. 维护周期：
   • 定期检查连接是否松动
   • 清洁设备内部灰尘
   • 定期备份配置参数和历史数据

AMAT Applied Materials  0120-90146量规控制器模块  英文资料：

AMAT Applied Materials 0120-90146 Gauge Controller Module

AMAT 0120-90146 is a high-precision gauge controller module designed specifically for semiconductor manufacturing equipment, used for online monitoring and control of various process parameters. It can collect sensor data in real-time and adjust process conditions through closed-loop control to ensure wafer processing quality.

Core specifications

Project specification remarks

Compatible with various AMAT devices such as Centura, Endura, Reflexion, P5000, etc

Input signal 0-10 V, 4-20 mA, digital encoder signal supports multiple sensor types

Output control 0-10 V, 4-20 mA, PWM signal, flexible relay contact control mode

Communication interfaces RS-485/RS-232, Ethernet, SECS/GEM facilitate factory automation integration

Sampling frequency up to 10 kHz can be configured according to requirements

Measurement accuracy ± 0.1% High precision measurement and control

Working temperature 0-50 ℃, it is recommended to use forced air cooling

Dual redundant 24 VDC power supply improves system reliability

The standard external dimensions are 19 "2U rack mounted for easy system integration

Features

High precision measurement and control: using advanced signal processing technology to ensure accurate and reliable measurement data

Multi channel parallel processing: can simultaneously connect multiple sensors to achieve synchronous monitoring of multiple parameters

Real time data processing: high-speed sampling and processing capabilities, timely response to process changes

Flexible control strategy: supports multiple algorithms such as PID control and adaptive control

Comprehensive fault diagnosis: equipped with channel fault detection and alarm functions

Historical data storage: Built in data storage function for easy process traceability and analysis

Typical Applications

Film thickness monitoring and control during etching process

Monitoring of Chemical Vapor Deposition (CVD) Process Parameters

Surface profile measurement of chemical mechanical polishing (CMP)

Monitoring of ion implantation dose uniformity

Status monitoring and data collection of various process equipment

Key points for installation and maintenance

Installation precautions:

Ensure good grounding and reduce electromagnetic interference

Separate the wiring of analog signal lines and power lines

Reserve sufficient heat dissipation space

Debugging suggestions:

Perform single point calibration first to ensure the accuracy of each channel

Gradually increase measurement points to verify system stability

Optimize control parameters to achieve optimal control effects

Maintenance cycle:

Regularly check for loose connections

Clean the dust inside the equipment

Regularly backup configuration parameters and historical data

AMAT Applied Materials  0120-90146量规控制器模块 产品展示      

 产品视频

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4.其他英文产品

ABB SLMG99 Switch input module
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ABB YT213001-BC YTE102C Thermocouple output module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218