AMAT Applied Materials MQDB011AAD03交流电伺服驱动器

AMAT Applied Materials MQDB011AAD03交流电伺服驱动器

1.产 品 资 料 介 绍：

AMAT Applied Materials MQDB011AAD03交流电伺服驱动器 英文资料：

High precision motion drive: supporting precise operation of semiconductor equipment

As the "power control core" of semiconductor equipment, MQDB011AAD03 servo driver takes millisecond level response and micrometer level positioning accuracy as its core, ensuring the precise execution of key actions such as wafer transfer and process chamber positioning, directly affecting chip manufacturing yield:

Multi dimensional precise control capability

Supports three core control modes: position, speed, and torque, adapting to different process scenario requirements:

Position control: Equipped with an absolute value encoder (resolution ≥ 17 bits), the positioning accuracy reaches ± 0.1 °, and the repeated positioning error is ≤± 3 μ m, which can meet the nanoscale positioning requirements of lithography equipment workbenches and wafer alignment platforms;

Speed control: The speed adjustment range is 0-3000rpm, with a speed fluctuation rate of ≤± 0.1%. When switching between high-speed operation (2000rpm) and low-speed fine-tuning (5rpm) of the wafer transfer robotic arm, there is no speed impact to avoid wafer shaking or falling;

Torque control: The torque output range is 0-10Nm, with a control accuracy of ± 1% F.S. It can accurately regulate the force of the robotic arm gripping the wafer (usually maintained at 0.5-2Nm), preventing damage to the wafer edge or slipping due to insufficient force.

High speed response and dynamic adjustment

Adopting a dual core architecture of digital signal processor (DSP) and FPGA, with a control cycle of ≤ 100 μ s and a dynamic response time of ≤ 5ms, it can quickly compensate for load fluctuations - for example, when the robotic arm grabs a wafer (load increases by 0.5kg), the driver completes torque adjustment within 10ms to ensure speed stability; Equipped with adaptive PID algorithm, it can automatically optimize control parameters according to load changes. In frequent start stop scenarios such as etching equipment chamber door switches, the start stop impact is ≤ 5m/s ², extending the service life of mechanical components.

Multi feedback mode adaptation

Compatible with digital Hall, incremental, and absolute encoder signals, supports 1Vpp sine wave signal acquisition, feedback signal ｕｐｄａｔｅ frequency ≥ 10kHz, and can capture real-time data such as motor speed and position deviation; High speed interaction between feedback data and the upper computer is achieved through CANopen bus, with a data transmission delay of ≤ 1ms, providing precise synchronization basis for multi axis collaborative control.

AMAT Applied Materials MQDB011AAD03交流电伺服驱动器 产品展示      

 产品视频

3.其他产品

LD800HSEEX 3BSE073314R1控制器模块
Siemens 6ES7307-1EA01-0AA0 电源模块
1C31197G01 定位器模块

4.其他英文产品

HIMA F6217 Input module
HIMA F6705 Output module
HIMA F7133 Output module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218