AMAT Applied Materials 3870-02656阀门锁定组件

AMAT Applied Materials 3870-02656阀门锁定组件

1.产 品 资 料 介 绍：

AMAT Applied Materials 3870-02656阀门锁定组件 英文资料：

1、 Core security locking mechanism

As a key protective component for semiconductor fluid control, the most prominent advantage of 3870-02656 is its bidirectional state locking capability. Referring to similar semiconductor valve locking technologies, it is highly likely to adopt a mechanical electronic dual locking structure: at the mechanical level, a spring-loaded steel ball locking pin is precisely engaged with the positioning groove of the valve handle, which can stably lock the valve in the "fully open" or "fully closed" state, avoiding valve displacement caused by equipment vibration or personnel misoperation; At the electronic level, micro switches may be integrated, which automatically trigger signal feedback when the component is in a locked state, and are linked with the AMAT FabWorks system to achieve real-time monitoring of the status, eliminating the risk of fluid leakage from both physical protection and intelligent warning dimensions.

2、 Rigorous environment adaptation design

For the special working conditions of semiconductor factories, this component fully considers corrosion resistance and cleanliness compatibility in terms of material and structure. The main material is speculated to be 316L stainless steel or PTFE reinforced composite material, which can withstand long-term corrosion from commonly used process chemicals such as HF and H2SO4 after passivation treatment. At the same time, it meets the ultra-low metal ion precipitation requirements of SEMI F57 standard and is suitable for cleanroom environments above level 10. The structural design adopts a no dead corner sealing process, with a gap width of ≤ 0.1mm, which can prevent particle accumulation and chemical residue. With an IP67 protection level, it can adapt to a wide temperature range of -30 ℃ to 85 ℃, meeting the strict requirements of thin film deposition, etching and other processes.

3、 High compatibility installation system

To adapt to the full range of AMAT fluid control valves, 3870-02656 adopts a modular quick installation design. Its interface size is compatible with commonly used valve types such as diaphragm valves and ball valves with specifications of DN15-DN50. It can be quickly installed in 30 seconds through an adjustable clamp structure without the need for mechanical modification of the original valve. The installation positioning accuracy reaches ± 0.5mm, ensuring the coaxiality between the locking component and the valve handle, and avoiding structural wear caused by long-term use. In addition, the component supports both horizontal and vertical installation postures, adapting to complex spatial scenarios in dense semiconductor equipment layouts.

4、 Humanized operation and diagnostic function

In terms of operational convenience, this component is designed with a visual state recognition and secure unlocking process. The shell integrates high brightness LED indicator lights, with green corresponding to "lock effective" and red corresponding to "unlock status", and is matched with a mechanical dial to achieve dual status confirmation. The unlocking process requires triggering the mechanical unlocking mechanism with a dedicated key and synchronously verifying the electronic authorization signal (optional RFID card unlocking) to prevent unauthorized operations. At the same time, the component is equipped with a built-in fault diagnosis module that can monitor abnormalities such as locking mechanism jamming and micro switch failure in real time. These abnormalities are transmitted to the equipment control system through dry contact signals, which comply with SEMI S2 equipment safety standards.

AMAT Applied Materials  3870-02656阀门锁定组件 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218