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AMAT Applied Materials 20-000314-003模拟输入模块

发布时间:2025-10-13人气:
  • AMAT Applied Materials 20-000314-003模拟输入模块
  • AMAT Applied Materials 20-000314-003模拟输入模块
  • AMAT Applied Materials 20-000314-003模拟输入模块

AMAT Applied Materials 20-000314-003模拟输入模块

1.产 品 资 料 介 绍:

一、核心信号采集性能特性
  1. 高精度多通道采集能力
专为半导体设备工艺参数采集设计,推测集成 8-16 路独立模拟输入通道,可同步采集电压(如 0-10V、4-20mA)、热电偶(如 K 型、J 型)、RTD(铂电阻)等多种类型信号,覆盖温度、压力、流量、液位等关键工艺参数。搭载 16 位高精度模数转换器(ADC),转换精度达 ±0.02% FS,采样速率最高可达 1kHz / 通道,能捕捉微小信号波动(如毫伏级温度变化),为工艺闭环控制提供精准原始数据。
  1. 信号调理与抗干扰优化
每路输入通道均配备独立信号调理电路,包括低噪声放大、滤波、冷端补偿(针对热电偶信号)等功能,可有效抑制共模干扰与串模干扰。采用差分输入设计,共模抑制比(CMRR)≥80dB@50/60Hz,配合板载 EMC 滤波组件,符合 EN 55022 Class B 电磁兼容标准,能抵御半导体车间射频设备、电机集群产生的杂散干扰,确保采集数据稳定性。
  1. 宽量程适配与灵活配置
支持多量程自适应切换,电压信号量程覆盖 ±5V、±10V、0-5V、0-10V,电流信号支持 4-20mA、0-20mA,热电偶信号可适配 - 200~1300℃测量范围(依类型而定)。通过 AMAT 专用配置软件或硬件拨码开关,可自定义每路通道的信号类型、量程及采样频率,适配不同工艺环节的采集需求。
二、系统协同与数据交互特性
  1. 多元化通信与集成能力
配备工业级通信接口,推测包括 1 路 EtherNet/IP、1 路 Modbus-TCP 及 1 路 RS485,可无缝对接 0190-24007 单板计算机、设备主控单元及工厂 MES 系统。支持实时数据传输(延迟≤10ms),能将采集的工艺参数同步上传至控制系统,为电机驱动、阀门调节等执行机构提供决策依据,实现工艺参数的动态闭环控制。
  1. 诊断与告警功能
内置完善的自诊断机制,可实时监测通道开路、短路、过压及模块自身温度异常等故障,当检测到异常时,通过通信接口输出告警信号,并在模块面板 LED 指示灯显示故障代码(如通道 1 开路对应 “CH1-OP”)。支持告警阈值自定义设置,如温度超限时触发三级告警,助力运维人员快速定位并处理故障。
  1. 与 AMAT 设备生态兼容
硬件接口与通信协议深度适配 AMAT 半导体设备(如 Endura® 薄膜沉积系统、Mirra® CMP 设备),可直接接入设备原有控制系统,无需额外开发适配驱动。兼容 AMAT 设备的固件升级体系,可通过远程更新实现功能扩展(如新增信号类型支持),降低系统集成成本。

AMAT Applied Materials 20-000314-003模拟输入模块 英文资料:

1、 Performance characteristics of core signal acquisition

High precision multi-channel acquisition capability

Specially designed for semiconductor equipment process parameter acquisition, it is speculated to integrate 8-16 independent analog input channels, which can synchronously collect various types of signals such as voltage (such as 0-10V, 4-20mA), thermocouple (such as K type, J type), RTD (platinum resistance), etc., covering key process parameters such as temperature, pressure, flow rate, liquid level, etc. Equipped with a 16 bit high-precision analog-to-digital converter (ADC), the conversion accuracy reaches ± 0.02% FS, and the sampling rate can reach up to 1kHz/channel. It can capture small signal fluctuations (such as millivolt level temperature changes) and provide accurate raw data for process closed-loop control.

Signal conditioning and anti-interference optimization

Each input channel is equipped with an independent signal conditioning circuit, including low-noise amplification, filtering, cold junction compensation (for thermocouple signals) and other functions, which can effectively suppress common mode interference and series mode interference. Adopting differential input design, common mode rejection ratio (CMRR) ≥ 80dB@50 /60Hz, Combined with onboard EMC filtering components, it complies with EN 55022 Class B electromagnetic compatibility standards and can resist stray interference generated by RF equipment and motor clusters in semiconductor workshops, ensuring the stability of data acquisition.

Wide range adaptation and flexible configuration

Support multi range adaptive switching, voltage signal range covers ± 5V, ± 10V, 0-5V, 0-10V, current signal supports 4-20mA, 0-20mA, thermocouple signal can adapt to measurement range of -200~1300 ℃ (depending on type). By using AMAT dedicated configuration software or hardware dip switches, the signal type, range, and sampling frequency of each channel can be customized to meet the acquisition requirements of different process stages.

2、 System collaboration and data interaction characteristics

Diversified communication and integration capabilities

Equipped with industrial grade communication interfaces, including 1 EtherNet/IP, 1 Modbus TCP, and 1 RS485, it can seamlessly interface with 0190-24007 single board computers, equipment control units, and factory MES systems. Support real-time data transmission (delay ≤ 10ms), can synchronously upload the collected process parameters to the control system, provide decision-making basis for motor drive, valve regulation and other actuators, and achieve dynamic closed-loop control of process parameters.

Diagnostic and alarm functions

Equipped with a comprehensive self diagnostic mechanism, it can monitor faults such as channel open circuit, short circuit, overvoltage, and module temperature abnormalities in real time. When abnormalities are detected, an alarm signal is output through the communication interface, and a fault code is displayed on the module panel LED indicator light (such as channel 1 open circuit corresponding to "CH1-OP"). Support custom setting of alarm thresholds, such as triggering a three-level alarm when the temperature exceeds the limit, to assist operation and maintenance personnel in quickly locating and handling faults.

AMAT Applied Materials 20-000314-003模拟输入模块 产品展示      

21-000314-003_pcb_emm_com_analog_20-000314-003_applied_precision_5.jpg

 产品视频

3.其他产品

PPD5134-20-110615控制器模块
ZYGO 7702 BH5-6314激光头
KONGSBERG RCU602远程I/O模块

4.其他英文产品

CI867 3BSE043661R1 Pulse input module
IC695CRU320CA-EL Gas turbine module
MVME162-213 pulse output card

AMAT 0100-77063AMAT 0190-41807AMAT 0190-15320
AMAT 0100-00335AMAT 0190-42017AMAT 0190-15377
AMAT 0100-77014AMAT 0190-42489AMAT 0190-15380
AMAT 0100-00629AMAT 0190-42839AMAT 0190-15384
AMAT 0100-35232AMAT 0190-43079 AMAT 0190-15389
AMAT 0100-01676AMAT 0190-43080AMAT 0190-15401
AMAT 0100-71055AMAT 0190-43437AMAT 0190-15402

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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