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Nikon KT002155-03 控制器模块

发布时间:2026-08-28人气:
  • Nikon KT002155-03 控制器模块
  • Nikon KT002155-03 控制器模块

Nikon KT002155-03 控制器模块 

1.产 品 资 料 介 绍:

Nikon KT002155‑03 是 NSR 光刻机机柜插装式控制器模块,负责曝光子系统 IO 信号处理与部件时序逻辑管控。
应用领域
1. 光刻机曝光单元时序逻辑控制
2. 光刻设备光学照明模组信号处理
3. 工件台、掩模台附属机构 IO 管控
4. 光刻机传感器信号采集与状态解析
5. 曝光光路执行器件驱动逻辑输出
6. 光刻机内部总线数据交互中转
7. 曝光剂量相关辅助单元控制
8. 半导体光刻设备机柜插卡式子板
9. 设备故障状态采集与告警上报
10. 精密曝光设备子系统协同调度
产品参数
1. 板卡插装结构,适配光刻机标准插槽安装
2. 多路数字输入输出通道,处理传感器信号
3. 机柜内部直流供电,抗电磁干扰 PCB 设计
4. 具备硬件自检,故障信号输出至主机系统
5. 内部专用设备总线,完成多模块数据通讯
综上,Nikon KT002155‑03 控制器模块时序控制精准,信号采集稳定,是尼康 DUV 光刻机曝光子系统重要板卡部件

Nikon KT002155-03 控制器模块 产品英文介绍

Nikon KT002155-03 is a plug-in controller module for NSR lithography machine cabinets, responsible for IO signal processing and component timing logic control of the exposure subsystem.

Application areas

1. Timing logic control of lithography machine exposure unit

2. Signal processing of optical illumination module in lithography equipment

3. IO control of workpiece table and mask table accessories

4. Photolithography machine sensor signal acquisition and state analysis

5. Exposure light path execution device driving logic output

6. Internal bus data exchange relay of lithography machine

7. Exposure dose related auxiliary unit control

8. Semiconductor lithography equipment cabinet card type daughter board

9. Equipment fault status collection and alarm reporting

10. Collaborative scheduling of precision exposure equipment subsystems

Product Parameters

1. Card insertion structure, suitable for installation in standard slots of lithography machines

2. Multiple digital input and output channels for processing sensor signals

3. DC power supply inside the cabinet, anti electromagnetic interference PCB design

4. Equipped with hardware self-test and fault signal output to the host system

5. Internal dedicated device bus to complete multi module data communication

In summary, the Nikon KT002155-03 controller module has precise timing control and stable signal acquisition, making it an important component of the Nikon DUV lithography exposure subsystem

Nikon KT002155-03 控制器模块  产品展示

KT002155-03.webp (1).jpg

视频展示


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英文产品

EPRO PR9268/307-100 9200-06121n front-end
PHILIPS SCM040 940860010011 Digital output module
SD-108542 processor

IC3600SCBB1A531X210DMCAMM1IC3600SPRF1
IC3600SCBB1531X210DMCALM1IC3600SPRB1
IC3600SCBAB1531X210DMCAGM1IC3600SPRA1
IC3600SCBA1A531X210DMCAEM1IC3600SPPB1
IC3600SCBA1531X210DMCACM1IC3600SPPA1
IC3600SCAB1531X207LCSAMG1IC3600SPOA1
IC3600SBMB1531X207LCSALG1IC3600SOTJ1G

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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