1.产 品 资 料 介 绍：
Nikon 4T070-668 放大器模块 产品英文介绍
Nikon 4T070-668 is an NSR immersion lithography machine FID-Y alignment amplifier module used for alignment detection optical path signal amplification processing, compatible with S620D series ArF scanning lithography machines.
Application areas
1. Photolithography machine FID-Y alignment detection optical path signal amplification
2. Wafer etching alignment sensor signal processing
3. Alignment subsystem drive unit of immersion lithography machine
4. Analysis of exposure equipment workpiece alignment data
5. Optical alignment measurement channel power signal conditioning
6. Photolithography cabinet plug-in alignment dedicated amplifier board
7. Mask alignment optical system signal conversion output
8. Collection and processing of wafer position offset detection signals
9. Alignment of lithography equipment with optical path closed-loop feedback unit
10. Optical detection module for semiconductor scanning exposure equipment
Product Parameters
1. The whole machine has a drawer style module structure that is compatible with the slot installation of lithography machine cabinets
2. Amplify weak optical detection signals to ensure alignment measurement accuracy
3. DC power supply inside the cabinet, high resistance to electromagnetic interference hardware design
4. Hardware self-test function, fault alarm output to the device host
5. The internal dedicated bus of the device completes high-speed transmission of alignment data
In summary, the Nikon 4T070-668 amplifier module has high signal processing accuracy and ensures wafer alignment performance, making it a key component of the alignment subsystem of the Nikon ArF immersion lithography machine.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
