1.产 品 资 料 介 绍：
Daihen TW39-000021-11 射频自动匹配器 产品英文介绍
Daihen TW39-000021-11 is a semiconductor process RF automatic matching device that adjusts impedance in real-time, reduces reflected power, and ensures stable power transmission in the plasma chamber.
Application areas
1. Impedance matching control of semiconductor dielectric etching equipment
2. RF impedance adjustment of PECVD thin film deposition chamber
3. Power matching for remote plasma source chamber cleaning
4. Adaptation of plasma load in dry etching wafer process
5. Chip ashing and debonding process RF circuit tuning
6. RF matching of atomic layer deposition ALD equipment
7. Compound semiconductor plasma process system
8. Dynamic adaptation of RF load for PVD coating machine
9. Plasma treatment of semiconductor load lock cavity
10. RF power supply supporting unit for semiconductor process equipment
Product Parameters
1. Suitable for 13.56MHz RF frequency band, wide impedance automatic tuning range
2. Fast matching response, quickly reducing reflected power after process switching
3. Water cooling and heat dissipation structure, supporting continuous operation of 7 × 24-hour production line
4. Equipped with analog and digital communication interfaces to interface with the main control system of the equipment
5. Built in over power, over temperature, and standing wave ratio over limit protection alarms
In summary, Daihen TW39-000021-11 has fast matching and tuning speed, and is resistant to process impedance fluctuations, making it a key impedance matching component for semiconductor plasma process RF links.
Daihen TW39-000021-11 射频自动匹配器 产品展示
视频展示
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| IC3600SCBH1 | 531X300CCHABM5 | IC3600SSIA1 |
| IC3600SCBE1A | 531X300CCHAAM5 | IC3600SSFG1B1B |
| IC3600SCBE1 | 531X300CCHAAFM5 | IC3600SSFG1B1A |
| IC3600SCBD4A | 531X221KLDADG1 | IC3600SSFG1A |
| IC3600SCBD4 | 531X213D10ABG1 | IC3600SSFG1 |
| IC3600SCBD3A | 531X213D10AAG1 | IC3600SQIC1 |
| IC3600SCBD3 | 531X212DPCABG1 | IC3600SQIA1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
