1.产 品 资 料 介 绍：
Verity SD2048GL高分辨率光谱仪 产品英文介绍
Verity SD2048GL high-resolution spectrometer, commonly used for endpoint detection in semiconductor plasma processes and replacement of equipment failure spare parts.
5 product features:
1. 2048 pixel CCD detector with high resolution and good spectral acquisition accuracy.
2. Can complete process endpoint judgment and support plasma luminescence signal analysis and diagnosis.
3. Excellent response in the ultraviolet band, suitable for strong light process environments such as etching and coating.
4. Integrated whole machine packaging, standard interface, easy on-site disassembly and replacement.
5. Comes with local data preprocessing to reduce the computational load on the device host.
5 product parameters:
1. Detection wavelength is 200-800nm.
2. The spectral resolution is better than 1.0nm.
3. Ethernet communication docking device host.
4. DC24V power supply.
5. The working environment temperature is 10-40 ℃.
5 application areas:
1. Plasma endpoint detection for semiconductor etching equipment.
2. PECVD and PVD thin film process spectral monitoring.
3. Plasma state monitoring of photoresist stripping process.
4. MEMS and display panel process optical inspection.
5. ｒｅｐｌａｃｅ the spectral module of the old process equipment due to malfunction.
Overall, the Verity SD2048GL is a discontinued process monitoring spare part, and the market mainly consists of disassembled parts. Prior to installation, wavelength calibration should be done to confirm software version compatibility before putting it into use.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
